Development ofCH4-Radio-Frequency-Plasma-Enhanced Chemical Vapor Deposition Method with a Positively Self-Biased Electrode for Diamond-Like Carbon Film

Radio Frequency ◽

Vapor Deposition ◽

Carbon Film ◽

Chemical Vapor ◽

Diamond Like Carbon ◽

Radio Frequency Plasma ◽

Deposition Method ◽

Synthesis of transparent diamond-like carbon film on the glass by radio-frequency plasma enhanced chemical vapor deposition

Journal of the Korean Crystal Growth and Crystal Technology ◽

10.6111/jkcgct.2012.22.4.190 ◽

2012 ◽

Vol 22 (4) ◽

pp. 190-193 ◽

Cited By ~ 4

Author(s):

Tae-Gyu Kim ◽

Yeong-Ho Shin ◽

Hyun Cho ◽

Jin-Kon Kim

Keyword(s):

Radio Frequency ◽

Vapor Deposition ◽

Carbon Film ◽

Chemical Vapor ◽

Diamond Like Carbon ◽

Radio Frequency Plasma ◽

Diamond Like Carbon Film ◽

Silicon rich silicon oxide films deposited by radio frequency plasma enhanced chemical vapor deposition method: Optical and structural properties

Applied Surface Science ◽

10.1016/j.apsusc.2011.05.112 ◽

2011 ◽

Vol 257 (23) ◽

pp. 9717-9723 ◽

Cited By ~ 24

Author(s):

Sumita Mukhopadhyay ◽

Swati Ray

Keyword(s):

Radio Frequency ◽

Structural Properties ◽

Vapor Deposition ◽

Silicon Oxide ◽

Chemical Vapor ◽

Radio Frequency Plasma ◽

Deposition Method ◽

Mechanical characterization of a-C:H:SiOx coatings synthesized using radio-frequency plasma-assisted chemical vapor deposition method

Thin Solid Films ◽

10.1016/j.tsf.2015.08.017 ◽

2015 ◽

Vol 590 ◽

pp. 299-305 ◽

Cited By ~ 31

Author(s):

D. Batory ◽

A. Jedrzejczak ◽

W. Szymanski ◽

P. Niedzielski ◽

M. Fijalkowski ◽

...

Keyword(s):

Radio Frequency ◽

Vapor Deposition ◽

Mechanical Characterization ◽

Chemical Vapor ◽

Radio Frequency Plasma ◽

Deposition Method ◽

Photo-induced properties of thin TiO2 films deposited using the radio frequency plasma enhanced chemical vapor deposition method

Thin Solid Films ◽

10.1016/j.tsf.2006.12.183 ◽

2007 ◽

Vol 515 (13) ◽

pp. 5275-5281 ◽

Cited By ~ 19

Author(s):

Hieronim Szymanowski ◽

Anna Sobczyk-Guzenda ◽

Adam Rylski ◽

Witold Jakubowski ◽

Maciej Gazicki-Lipman ◽

...

Keyword(s):

Radio Frequency ◽

Vapor Deposition ◽

Chemical Vapor ◽

Radio Frequency Plasma ◽

Tio2 Films ◽

Deposition Method ◽

Selective growth of CNT by using triode-type radio frequency plasma chemical vapor deposition method

Diamond and Related Materials ◽

10.1016/j.diamond.2006.11.066 ◽

2007 ◽

Vol 16 (4-7) ◽

pp. 1106-1109 ◽

Cited By ~ 4

Author(s):

Yoshiyuki Show ◽

Norihiko Fukuzumi

Keyword(s):

Radio Frequency ◽

Vapor Deposition ◽

Chemical Vapor ◽

Radio Frequency Plasma ◽

Deposition Method ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition ◽

Electrical and Optical Properties of Si-Incorporated a-C:H Films via the Radio Frequency Plasma-Enhanced Chemical Vapor Deposition Method

Journal of Nanoscience and Nanotechnology ◽

10.1166/jnn.2016.12216 ◽

2016 ◽

Vol 16 (5) ◽

pp. 5394-5397

Author(s):

In Jun Kim ◽

Won Seok Choi ◽

Byungyou Hong

Keyword(s):

Optical Properties ◽

Radio Frequency ◽

Vapor Deposition ◽

Chemical Vapor ◽

Radio Frequency Plasma ◽

Deposition Method ◽

Electrical And Optical Properties ◽

Tensile test of a silicon microstructure fully coated with submicrometer-thick diamond like carbon film using plasma enhanced chemical vapor deposition method

Japanese Journal of Applied Physics ◽

10.7567/jjap.56.06gn01 ◽

2017 ◽

Vol 56 (6S1) ◽

pp. 06GN01 ◽

Cited By ~ 2

Author(s):

Wenlei Zhang ◽

Akio Uesugi ◽

Yoshikazu Hirai ◽

Toshiyuki Tsuchiya ◽

Osamu Tabata

Keyword(s):

Tensile Test ◽

Vapor Deposition ◽

Carbon Film ◽

Chemical Vapor ◽

Diamond Like Carbon ◽

Deposition Method ◽

Diamond Like Carbon Film

Characterization and tribological application of diamond-like carbon (DLC) films prepared by radio-frequency plasma-enhanced chemical vapor deposition (RF-PECVD) technique

Frontiers of Materials Science in China ◽

10.1007/s11706-009-0070-8 ◽

2009 ◽

Vol 3 (4) ◽

pp. 409-414 ◽

Cited By ~ 1

Author(s):

Ning Cao ◽

Zhen-yi Fei ◽

Yong-xin Qi ◽

Wen-wen Chen ◽

Lu-lu Su ◽

...

Keyword(s):

Radio Frequency ◽

Vapor Deposition ◽

Chemical Vapor ◽

Diamond Like Carbon ◽

Radio Frequency Plasma ◽

Tribological Application ◽

Formation of Carbon Nitride Films by the Radio-Frequency Plasma Chemical Vapor Deposition Method

Japanese Journal of Applied Physics ◽

10.1143/jjap.36.4893 ◽

1997 ◽

Vol 36 (Part 1, No. 7B) ◽

pp. 4893-4896 ◽

Cited By ~ 17

Author(s):

Mei Zhang ◽

Ping Wang ◽

Yoshikazu Nakayama

Keyword(s):

Vapor Deposition ◽

Carbon Nitride ◽

Chemical Vapor ◽

Radio Frequency Plasma ◽

Deposition Method ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition ◽

Multi-layer haemocompatible diamond-like carbon coatings obtained by combined radio frequency plasma enhanced chemical vapor deposition and magnetron sputtering

Journal of Materials Science Materials in Medicine ◽

10.1007/s10856-013-5026-y ◽

2013 ◽

Vol 24 (12) ◽

pp. 2695-2707 ◽

Cited By ~ 12

Author(s):

A. C. Popa ◽

G. E. Stan ◽

M. A. Husanu ◽

I. Pasuk ◽

I. D. Popescu ◽

...

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Vapor Deposition ◽

Chemical Vapor ◽

Diamond Like Carbon ◽

Radio Frequency Plasma ◽

Carbon Coatings ◽