Study of diamond-like coatings by IR-spectral ellipsometry and Raman spectroscopy

2013 ◽  
Vol 13 (07) ◽  
Author(s):  
Mstislav Makeev ◽  
Ekaterina Jukova
2019 ◽  
Vol 127 (1) ◽  
pp. 170-176
Author(s):  
V. N. Kruchinin ◽  
M. V. Kruchinina ◽  
Ya. I. Prudnikova ◽  
E. V. Spesivtsev ◽  
S. V. Rykhlitskii ◽  
...  

2021 ◽  
Vol 129 (5) ◽  
pp. 618
Author(s):  
V.N. Kruchinin ◽  
V.A. Volodin ◽  
S.V. Rykhlitskii ◽  
V.A. Gritsenko ◽  
I.P. Posvirin ◽  
...  

The SiCOH low-k dielectric film was grown on Si substrate using plasma enhanced chemical vapor deposition method. Atomic structure and optical properties of the film were studied with the use of X-ray photoelectron spectroscopy (XPS), Fourier transform infrared (FTIR) absorption spectroscopy, Raman spectroscopy and ellipsometry. Analysis of XPS data showed that the low-k dielectric film consists of Si-O4 bonds (83%) and Si-SiO3 bonds (17%). In FTIR spectra some red-shift of Si-O-Si valence (stretching) vibration mode frequency was observed in the low-k dielectric film compared with the frequency of this mode in thermally grown SiO2 film. The peaks related to absorbance by C-H bonds were observed in FTIR spectrum. According to Raman spectroscopy data, the film contained local Si-Si bonds and also C-C bonds in the s-p3 and s-p2 hybridized forms. Scanning laser ellipsometry data show that the film is quite homogeneous, homogeneity of thickness is ~ 2.5%, and homogeneity of refractive index is ~ 2%. According to analysis of spectral ellipsometry data, the film is porous (porosity is about 24%) and contains clusters of amorphous carbon (~ 7%).


2005 ◽  
Vol 126 ◽  
pp. 101-105 ◽  
Author(s):  
B. Moulin ◽  
L. Hennet ◽  
D. Thiaudière ◽  
P. Melin ◽  
P. Simon

1965 ◽  
Vol 26 (11) ◽  
pp. 620-626 ◽  
Author(s):  
J.P. Russell
Keyword(s):  

1981 ◽  
Vol 42 (C6) ◽  
pp. C6-776-C6-778
Author(s):  
E. Cazzanelli ◽  
A. Fontana ◽  
G. Mariotto ◽  
F. Rocca ◽  
M. P. Fontana

1983 ◽  
Vol 44 (C10) ◽  
pp. C10-501-C10-503 ◽  
Author(s):  
J. D. Swalen ◽  
J. F. Rabolt

1987 ◽  
Vol 48 (C7) ◽  
pp. C7-761-C7-762
Author(s):  
B. LAVOREL ◽  
G. MILLOT ◽  
R. SAINT-LOUP ◽  
M. L. GONZE ◽  
J. SANTOS ◽  
...  

Sign in / Sign up

Export Citation Format

Share Document