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Fabrication and properties of the Y-doped Al2O3 high-k gate dielectric films
Acta Physica Sinica
◽
10.7498/aps.54.5901
◽
2005
◽
Vol 54
(12)
◽
pp. 5901
Author(s):
Guo De-Feng
◽
Geng Wei-Gang
◽
Lan Wei
◽
Huang Chun-Ming
◽
Wang Yin-Yue
Keyword(s):
Gate Dielectric
◽
Dielectric Films
◽
High K
◽
High K Gate Dielectric
Download Full-text
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Characterization of high-k gate dielectric films using SIMS
Applied Surface Science
◽
10.1016/s0169-4332(02)00725-0
◽
2003
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Vol 203-204
◽
pp. 516-519
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Author(s):
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◽
N. Morita
◽
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Growth and characterization of HfO2 high-k gate dielectric films by laser molecular beam epitaxy (LMBE)
Journal of Materials Science Materials in Electronics
◽
10.1007/s10854-006-0014-3
◽
2006
◽
Vol 17
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◽
pp. 685-688
◽
Cited By ~ 2
Author(s):
Y. K. Lu
◽
X. F. Chen
◽
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◽
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◽
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◽
Gate Dielectric
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◽
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High-k Gate Dielectric Films Studied by Extremely Asymmetric X-ray Diffraction and X-ray Photoelectron Spectroscopy
Journal of Physics Conference Series
◽
10.1088/1742-6596/83/1/012011
◽
2007
◽
Vol 83
◽
pp. 012011
◽
Cited By ~ 1
Author(s):
Yuki Ito
◽
Koichi Akimoto
◽
Hironori Yoshida
◽
Takashi Emoto
◽
Daisuke Kobayashi
◽
...
Keyword(s):
Photoelectron Spectroscopy
◽
Gate Dielectric
◽
Dielectric Films
◽
X Ray Diffraction
◽
X Ray
◽
High K
◽
High K Gate Dielectric
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Ultrathin High-k Gate Dielectric Films on Strained-Si/SiGe Heterolayers
IETE Journal of Research
◽
10.1080/03772063.2007.10876138
◽
2007
◽
Vol 53
(3)
◽
pp. 237-251
Author(s):
M K Bera
◽
C Mahata
◽
C K Maiti
Keyword(s):
Gate Dielectric
◽
Dielectric Films
◽
Strained Si
◽
High K
◽
High K Gate Dielectric
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Mixed Oxides as High-k Gate Dielectric Films
ECS Transactions
◽
10.1149/1.2193869
◽
2019
◽
Vol 2
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◽
pp. 13-22
◽
Cited By ~ 3
Author(s):
Rosa María Luna-Sánchez
◽
Ignacio González-Martínez
Keyword(s):
Gate Dielectric
◽
Mixed Oxides
◽
Dielectric Films
◽
High K
◽
High K Gate Dielectric
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Effect of barrier layer on the electrical and reliability characteristics of high-k gate dielectric films
International Electron Devices Meeting 1998. Technical Digest (Cat. No.98CH36217)
◽
10.1109/iedm.1998.746476
◽
2002
◽
Cited By ~ 1
Author(s):
Yongjoo Jeon
◽
Byoung Hun Lee
◽
K. Zawadzki
◽
Wen-Jie Qi
◽
A. Lucas
◽
...
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Barrier Layer
◽
Gate Dielectric
◽
Dielectric Films
◽
Reliability Characteristics
◽
High K
◽
High K Gate Dielectric
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The properties of high-k gate dielectric films deposited on HRSOI
Microelectronic Engineering
◽
10.1016/j.mee.2009.05.001
◽
2009
◽
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(12)
◽
pp. 2404-2407
◽
Cited By ~ 2
Author(s):
Xinhong Cheng
◽
Dapeng Xu
◽
Zhaorui Song
◽
Dawei He
◽
Yuehui Yu
◽
...
Keyword(s):
Gate Dielectric
◽
Dielectric Films
◽
High K
◽
High K Gate Dielectric
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Ternary HfO2 and La2O3 Based High-k Gate Dielectric Films for Advanced CMOS Applications
High Permittivity Gate Dielectric Materials - Springer Series in Advanced Microelectronics
◽
10.1007/978-3-642-36535-5_10
◽
2013
◽
pp. 371-394
◽
Cited By ~ 2
Author(s):
Akira Toriumi
◽
Koji Kita
Keyword(s):
Gate Dielectric
◽
Dielectric Films
◽
High K
◽
High K Gate Dielectric
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Mixed Oxides as High-k Gate Dielectric Films
ECS Meeting Abstracts
◽
10.1149/ma2006-01/9/377
◽
2006
◽
Keyword(s):
Gate Dielectric
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High K
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High K Gate Dielectric
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The effect of Si surface nitridation on the interfacial structure and electrical properties of (La2O3)0.5(SiO2)0.5 high-k gate dielectric films
Applied Surface Science
◽
10.1016/j.apsusc.2009.07.075
◽
2009
◽
Vol 256
(1)
◽
pp. 90-95
◽
Cited By ~ 6
Author(s):
L.G. Gao
◽
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◽
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◽
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◽
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◽
...
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Electrical Properties
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Gate Dielectric
◽
Interfacial Structure
◽
Dielectric Films
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High K
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High K Gate Dielectric
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