Multilayer Thin-Film Capacitor Fabricated by Radio-Frequency Magnetron Sputtering

2011 ◽  
Vol 50 (9S2) ◽  
pp. 09NA01 ◽  
Author(s):  
Yuji Imamiya ◽  
Isaku Kanno ◽  
Ryuji Yokokawa ◽  
Hidetoshi Kotera
Keyword(s):  
Thin Film ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Multilayer Thin Film ◽  
Radio Frequency Magnetron Sputtering ◽  
Film Capacitor ◽  
Thin Film Capacitor

Fabrication and characterizations of ZnO thin film transistors prepared by using radio frequency magnetron sputtering

2008 ◽  
Vol 52 (5) ◽  
pp. 813-816 ◽  
Author(s):  
R. Navamathavan ◽  
Chi Kyu Choi ◽  
Eun-Jeong Yang ◽  
Jae-Hong Lim ◽  
Dae-Kue Hwang ◽  
...  
Keyword(s):  
Thin Film ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Thin Film Transistors ◽  
Radio Frequency Magnetron ◽  
Zno Thin Film ◽  
Radio Frequency Magnetron Sputtering

ZnO thin film synthesis by reactive radio frequency magnetron sputtering

2014 ◽  
Vol 318 ◽  
pp. 2-5 ◽  
Author(s):  
Volkan Şenay ◽  
Suat Pat ◽  
Şadan Korkmaz ◽  
Tuna Aydoğmuş ◽  
Saliha Elmas ◽  
...  
Keyword(s):  
Thin Film ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Zno Thin Film ◽  
Radio Frequency Magnetron Sputtering ◽  
Film Synthesis
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