Characterization of Oxide Traps in 28 nm n-Type Metal–Oxide–Semiconductor Field-Effect Transistors with Different Uniaxial Tensile Stresses Utilizing Random Telegraph Noise

2013 ◽  
Vol 52 (4S) ◽  
pp. 04CC24 ◽  
Author(s):  
Bo-Chin Wang ◽  
San-Lein Wu ◽  
Yu-Ying Lu ◽  
Chien-Wei Huang ◽  
Chung-Yi Wu ◽  
...  
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