Infrared spectroscopic ellipsometry applied to the characterization of nano-structures of silicon IC manufacturing

2004 ◽  
Vol 450 (1) ◽  
pp. 173-177 ◽  
Author(s):  
P Boher ◽  
M Bucchia ◽  
C Guillotin ◽  
C Defranoux
Keyword(s):  
Spectroscopic Ellipsometry ◽  
Nano Structures ◽  
Ic Manufacturing ◽  
Infrared Spectroscopic

Combined characterization of conductive materials by infrared spectroscopic ellipsometry and grazing X-ray reflectance

1998 ◽  
Vol 319 (1-2) ◽  
pp. 67-72 ◽  
Author(s):  
Pierre Boher ◽  
Michel Luttmann ◽  
Jean Louis Stehle ◽  
Louis Hennet
Keyword(s):  
Spectroscopic Ellipsometry ◽  
X Ray ◽  
Conductive Materials ◽  
Infrared Spectroscopic

Microstructure Characterization of Skeletal Silica in Porous Low-k Films by Infrared Spectroscopic Ellipsometry

2004 ◽  
Author(s):  
Syozo Takada ◽  
Nobuhiro Hata ◽  
Yutaka Seino ◽  
Nobutoshi Fujii ◽  
Takamaro Kikkawa
Keyword(s):  
Spectroscopic Ellipsometry ◽  
Microstructure Characterization ◽  
Infrared Spectroscopic ◽  
Low K

scholarly journals Simultaneous characterization of physical, chemical, and thermal properties of polymeric multilayers using infrared spectroscopic ellipsometry

2018 ◽  
Vol 553 ◽  
pp. 155-168 ◽  
Author(s):  
David A. Castilla-Casadiego ◽  
Luis Pinzon-Herrera ◽  
Maritza Perez-Perez ◽  
Beatriz A. Quiñones-Colón ◽  
David Suleiman ◽  
...  
Keyword(s):  
Thermal Properties ◽  
Spectroscopic Ellipsometry ◽  
Physical Chemical ◽  
Infrared Spectroscopic

Infrared spectroscopic ellipsometry applied to the characterization of ultra shallow junction on silicon and SOI

2004 ◽  
Vol 455-456 ◽  
pp. 150-156 ◽  
Author(s):  
C. Defranoux ◽  
T. Emeraud ◽  
S. Bourtault ◽  
J. Venturini ◽  
P. Boher ◽  
...  
Keyword(s):  
Spectroscopic Ellipsometry ◽  
Shallow Junction ◽  
Infrared Spectroscopic

Synchrotron infrared spectroscopic ellipsometry for characterization of biofunctional surfaces

2010 ◽  
Vol 247 (8) ◽  
pp. 1925-1931 ◽  
Author(s):  
Guoguang Sun ◽  
Dana Maria Rosu ◽  
Xin Zhang ◽  
Marc Hovestädt ◽  
Simona Pop ◽  
...  
Keyword(s):  
Spectroscopic Ellipsometry ◽  
Infrared Spectroscopic
Sign in / Sign up

Export Citation Format

Share Document