High-Rate Growth of Defect-Free Epitaxial Si at Low Temperatures by Atmospheric Pressure Plasma CVD
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2008 ◽
Vol 40
(6-7)
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pp. 984-987
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1999 ◽
Vol 65
(11)
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pp. 1600-1604
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2004 ◽
Vol 70
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pp. 1418-1422
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2008 ◽
Vol 40
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pp. 979-983
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2004 ◽
Vol 70
(7)
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pp. 956-960
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