Deposition Step-height Measurement for ITO Thin Film Pattern Fabricated with Photo-lithography using Digital Holography

2020 ◽  
Vol 40 (1) ◽  
pp. 9-15
Author(s):  
Ju Yeop Shin ◽  
Kyeong Suk Kim ◽  
Hyun Chul Jung
Keyword(s):  
Thin Film ◽  
Digital Holography ◽  
Step Height ◽  
Height Measurement ◽  
Deposition Step

The use of transmission and analytical electron microscopy in studying reactions and phase transformations in thin film

1993 ◽  
Vol 51 ◽  
pp. 842-843
Author(s):  
K. Barmak
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Phase Transformations ◽  
Analytical Electron Microscopy ◽  
Ex Situ ◽  
Multilayer Thin Films ◽  
Absolute Concentration ◽  
Analytical Electron ◽  
Deposition Step

Generally, processing of thin films involves several annealing steps in addition to the deposition step. During the annealing steps, diffusion, transformations and reactions take place. In this paper, examples of the use of TEM and AEM for ex situ and in situ studies of reactions and phase transformations in thin films will be presented.The ex situ studies were carried out on Nb/Al multilayer thin films annealed to different stages of reaction. Figure 1 shows a multilayer with dNb = 383 and dAl = 117 nm annealed at 750°C for 4 hours. As can be seen in the micrograph, there are four phases, Nb/Nb3-xAl/Nb2-xAl/NbAl3, present in the film at this stage of the reaction. The composition of each of the four regions marked 1-4 was obtained by EDX analysis. The absolute concentration in each region could not be determined due to the lack of thickness and geometry parameters that were required to make the necessary absorption and fluorescence corrections.

Digital holography with a set of two close wavelengths for height measurement of solder bumps

2020 ◽  
Vol 59 (SO) ◽  
pp. SOOE03
Author(s):  
Hiroyuki Ishigaki ◽  
Takahiro Mamiya ◽  
Yoshio Hayasaki
Keyword(s):  
Digital Holography ◽  
Height Measurement ◽  
Solder Bumps

scholarly journals Simple tunable dual-wavelength fiber laser and multiple self-mixing interferometry to large step height measurement

2016 ◽  
Vol 24 (19) ◽  
pp. 21880 ◽  
Author(s):  
Lianlian Dong ◽  
Fang Xie ◽  
Sen Ma ◽  
Yunzhi Wang ◽  
Liang Chen
Keyword(s):  
Fiber Laser ◽  
Dual Wavelength ◽  
Step Height ◽  
Height Measurement ◽  
Large Step

Stroboscopic Two-Wavelength Interferometer for Disturbance-Free Step-Height Measurement

2005 ◽  
Author(s):  
Takamasa Suzuki ◽  
Masanori Ohida ◽  
Kazuhiro Yokoyama ◽  
Osami Sasaki
Keyword(s):  
Step Height ◽  
Height Measurement

An Investigation of Molecular Interactions between Zinc Phthalocyanine Thin Film and Various Oxidizing Gases for Sensor Applications

2011 ◽  
Vol 403-408 ◽  
pp. 48-51 ◽  
Author(s):  
Rawat Jaisutti ◽  
Tanakorn Osotchan
Keyword(s):  
Thin Film ◽  
Step Height ◽  
Zinc Phthalocyanine ◽  
Current Response ◽  
Sensor Applications ◽  
Measuring Period ◽  
Gas Molecules ◽  
Response Current ◽  
Different Response ◽  
So2 Concentration

Molecular interaction between zinc phthalocyanine (ZnPc) thin films and various oxidizing gas molecules was examined by measuring sensor response of chemiresistor structures. The different response types can be obtained from the interactions to gas molecules of nitrogen dioxide (NO2), sulfur dioxide (SO2) and carbon monoxide (CO). For NO2 interaction, the response current of thermal evaporated ZnPc thin film with metal inter-digitaged pattern electrodes was proportionally increase to the concentration of NO2 gas. For measurement cycle, the NO2 gas at desired concentration was flowed into the measuring chamber for 20 minutes then the nitrogen gas was flowed for 20 minutes to recovering the interaction. The current response exhibited the step up and down during this measuring cycle and the heights of response step were proportional to the NO2 concentration. For SO2 measuring cycle, the response step increased at the beginning cycle then the response of ZnPc thin film seemed to be saturate and remained the same response step height even increasing the SO2 concentration. It was found that if the SO2 concentration was maintained at the same value for each measuring period, the response current was increase for the first few cycles after that the response step height decreased and became almost constant at lower value after passing more than ten measuring cycles. However this phenomenon can recover if the ZnPc surface was leaved in air for a few days. Therefore the interaction between ZnPc and SO2 molecules can modify the ZnPc surface and change the gas response. With the same measurement setup, it cannot found any significant change in the response current of the ZnPc film under the CO gas exposure up to concentration of 250 ppm. This result indicated that no interaction between ZnPc and CO molecules can be observed and these different responses on various gas molecules can demonstrate the selectivity of using ZnPc as a gas sensor.

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