An in-line slot waveguide sensor built in a polished flat platform of a D-shaped silicon cored fiber with a taper coupled region is proposed and investigated thoroughly. Simulation results show that the single-mode light field sustained in the silicon cored fiber can be efficiently transferred to the slot waveguides through the tapered region. The geometry parameters of the slot waveguide sensors are optimized to have the corresponding highest power confinement factors and the resultant sensor sensitivities. The three-slot waveguide sensor is found to have the best performance among one-, two- and three-slot waveguides at the mid-IR wavelength.
SiN half-etch horizontal slot waveguides for integrated photonics: numerical modeling, fabrication, and characterization of passive components
