Microstructure evolution in monocrystalline silicon in cyclic microindentations

The study presents evidence of the microstructural evolution during cyclic indentation of monocrystalline silicon with a spherical indenter. Transmission electron microscopy examination of microindentation on cross-section view samples showed that the structure change in the transformation zone features a decomposition of the amorphous phase to R8/BC8 crystals. Outside the zone, cyclic loading gives rise to bending of pristine silicon, slip penetration, and radial cracking. The development of the load–displacement curves during consecutive indentations is justified in terms of the phase transformation events observed.