high frequency compensation
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2021 ◽  
Author(s):  
Xinxin Wang ◽  
Xiaobin Yin ◽  
Zhenchun Li ◽  
Jianguo Song ◽  
Kai Zhang

2020 ◽  
Vol 17 (5-6) ◽  
pp. 747-755
Author(s):  
Hui-Feng Li ◽  
Jin Wang ◽  
Zheng-Rong Wei ◽  
Fei-Long Yang

2019 ◽  
Vol 822 ◽  
pp. 587-593
Author(s):  
Gleb A. Iankevich

The Langmuir probe plasma parameters diagnostics method was studied based on the ICP plasma chemical processing system. Single Langmuir probe with high-frequency compensation system and the special electrical circuit was designed and constructed. CV dependences in various working pressures were registered.


2015 ◽  
Vol 1 ◽  
pp. 534-545 ◽  
Author(s):  
Emrullah Korkmaz ◽  
B. Arda Gozen ◽  
Bekir Bediz ◽  
O. Burak Ozdoganlar

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