The Fabrication and Indentation of Cubic Silicon Carbide Diaphragm for Acoustic Sensing

In this study, 550 nm thick cubic silicon carbide square diaphragms were back etched from Si substrate. Then, indentation was carried out to samples with varying dimensions, indentation locations, and loads. The influence of three parameters is documented by analyzing load-displacement curves. It was found that diaphragms with bigger area, indented at the edge, and low load demonstrated almost elastic behaviour. Furthermore, two samples burst and one of them displayed pop-in behaviour, which we determine is due to plastic deformation. Based on optimum dimension and load, we calculate maximum pressure for elastic diaphragms. This pressure is sufficient for cubic silicon carbide diaphragms to be used as acoustic sensors to detect poisonous gasses.

Design and implementation of anulus-shaped ciliary structure for four-unit MEMS vector hydrophone

Inspired from fish bionics, an anulus-shaped ciliary structure for four-unit MEMS vector hydrophone (AFUVH) is proposed in this paper. It replaces the previous bionic cilium-shaped structure and becomes a novel sensing structure in the four-unit MEMS vector hydrophone (FUVH), which realizes the complete simulation of the fish lateral line neuromasts structurally and functionally. It not only improves the sensitivity of FUVH, but also retains a sufficient bandwidth, which improves the overall performance of FUVH for monitoring remote ships noise. Meanwhile, this paper theoretically analyzes the performance of AFUVH for detecting acoustic signals. ANSYS 17.0 simulation is used to derive the parameters of effective structure and optimum dimension structure of annulus-shaped ciliary structure. Finally, the experimental results show that comparing with cilium-structured FUVH, the sensitivity of AFUVH with effective structure is increased by 3.92 dB, and the sensitivity of AFUVH with optimum dimension structure is increased by 5.87 dB, reaching up to −177.53 dB.

Theoretical and Experimental Research Regarding Operating Conditions of the Refrigeration Absorption/Adsorption Machines Using Solar Energy

In this article is presents a short analyze of a solar cooling systems using absorption and adsorption chillers. We try to pick the optimum dimension for the principal equipment of a cooling system for a holiday house place in Mediterranean climate using TRNSYS software.