scholarly journals The Fabrication and Indentation of Cubic Silicon Carbide Diaphragm for Acoustic Sensing

Micromachines ◽  
2021 ◽  
Vol 12 (9) ◽  
pp. 1101
Author(s):  
Siti Aisyah Zawawi ◽  
Azrul Azlan Hamzah ◽  
Burhanuddin Yeop Majlis ◽  
Faisal Mohd-Yasin

In this study, 550 nm thick cubic silicon carbide square diaphragms were back etched from Si substrate. Then, indentation was carried out to samples with varying dimensions, indentation locations, and loads. The influence of three parameters is documented by analyzing load-displacement curves. It was found that diaphragms with bigger area, indented at the edge, and low load demonstrated almost elastic behaviour. Furthermore, two samples burst and one of them displayed pop-in behaviour, which we determine is due to plastic deformation. Based on optimum dimension and load, we calculate maximum pressure for elastic diaphragms. This pressure is sufficient for cubic silicon carbide diaphragms to be used as acoustic sensors to detect poisonous gasses.

2009 ◽  
Vol 2009 ◽  
pp. 1-5 ◽  
Author(s):  
K. Y. Cheong ◽  
Z. Lockman

Cubic-SiC nanowires were synthesized using activated carbon powder and Si substrate in vacuum at 1200–1350°C for 1–4 hours. The nanowires were grown according to the following proposed mechanisms: (1) diffusion of C/CO into Si substrate, (2) weakening of Si bond and atomic kick-out, (3) formation of Si-C in vapor phase, (4) formation of saturated SiC layer, (5) formation of pyramid-like SiC nanostructure, and (6) formation of SiC nanowires.


2021 ◽  
Vol 103 (19) ◽  
Author(s):  
Peter A. Schultz ◽  
Renee M. Van Ginhoven ◽  
Arthur H. Edwards

1990 ◽  
Vol 195 ◽  
Author(s):  
T.E. Schlesinger ◽  
A. Gavrin ◽  
R.C. Cammarata ◽  
C.-L. Chien

ABSTRACTThe mechanical properties of sputtered Ni-Al2O3 granular thin films were investigated by low load microharaness testing. It was found that the microhardness of these films displayed a percolation threshold at a nickel volume fraction of about 0.6, below which the hardness is greatly enhanced. This behavior is qualitatively similar to the electrical and magnetic properties of these types of films. A percolation threshold in hardness can be understood as due to a change in the mechanism for plastic deformation.


Author(s):  
Vittorio Manente ◽  
Bengt Johansson ◽  
Pert Tunestal

EGR sweeps were performed on Ethanol Partially Premixed Combustion, PPC, to show different emission and efficiency trends as compared to Diesel PPC. The sweeps showed that increasing the EGR rate the efficiency does not diminish, HC trace is flat and CO is low even with 45% of EGR. NOx exponentially decreases by increasing EGR while soot levels are nearly zero throughout the sweep. The EGR sweeps underlined that at high EGR levels, the pressure rise rate is a concern. To overcome this problem and keep high efficiency and low emissions a sweep in timing of the pilot injection and pilot-main ratio was done at ∼16.5 bar gross IMEP. It was found that with a pilot-main ratio of 50–50 and by placing the pilot at −60 with 42% of EGR, NOx and soot are below EURO VI levels, the indicated efficiency is 47% and the maximum pressure rise rate is below 10 bar/CAD. Low load conditions were examined as well. It was found that by placing the SOI at −35 TDC the efficiency is maximized on the other hand when the injection is at −25 the emissions are minimized and the efficiency is only 1.64% lower than its optimum value. The idle test also showed that a certain amount of EGR is needed in order to minimize the pressure rise rate.


1999 ◽  
Vol 17 (5) ◽  
pp. 2629-2633 ◽  
Author(s):  
F. Amy ◽  
L. Douillard ◽  
V. Yu. Aristov ◽  
P. Soukiassian

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