Framework the paper we consider an analytical approach to analyze mass and heat transport in heterostructures during manufacturing of integrated circuits with account nonlinearity of processes. The approach gives a possibility to analyze mass and heat transport in multilayer structures
without crosslinking of solutions on interfaces between layers. The approach also gives a possibility to take into account spatial and temporal variation of parameters of considered processes. Based on this approach we analyzed manufacturing a current comparator for sensor applications to
increase density of elements.