On Analysis of Mass Transport to Formulate Conditions for Increasing Integration Rate of Elements Framework Current Comparator in Sensor Applications. An Approach to Optimize of Technological Process
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Framework the paper we consider an analytical approach to analyze mass and heat transport in heterostructures during manufacturing of integrated circuits with account nonlinearity of processes. The approach gives a possibility to analyze mass and heat transport in multilayer structures without crosslinking of solutions on interfaces between layers. The approach also gives a possibility to take into account spatial and temporal variation of parameters of considered processes. Based on this approach we analyzed manufacturing a current comparator for sensor applications to increase density of elements.
2021 ◽
Vol 10
(2)
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pp. 122
2021 ◽
Vol 23
(1)
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pp. 1-53
2021 ◽
Vol 7
(4)
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2021 ◽
Vol 23
(2)
◽
pp. 111-163
2020 ◽
Vol 21
(1)
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pp. 23-69
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