Coupled Finite Element-Finite Volume Multi-Physics Analysis of MEMS Electrothermal Actuators

Microelectromechanical systems (MEMS) are the instruments of choice for high-precision manipulation and sensing processes at the microscale. They are, therefore, a subject of interest in many leading industrial and academic research sectors owing to their superior potential in applications requiring extreme precision, as well as in their use as a scalable device. Certain applications tend to require a MEMS device to function with low operational temperatures, as well as within fully immersed conditions in various media and with different flow parameters. This study made use of a V-shaped electrothermal actuator to demonstrate a novel, state-of-the-art numerical methodology with a two-way coupled analysis. This methodology included the effects of fluid–structure interaction between the MEMS device and its surrounding fluid and may be used by MEMS design engineers and analysts at the design stages of their devices for a more robust product. Throughout this study, a thermal–electric finite element model was strongly coupled to a finite volume model to incorporate the spatially varying cooling effects of the surrounding fluid (still air) onto the V-shaped electrothermal device during steady-state operation. The methodology was compared to already established and accepted analysis methods for MEMS electrothermal actuators in still air. The maximum device temperatures for input voltages ranging from 0 V to 10 V were assessed. During the postprocessing routine of the two-way electrothermal actuator coupled analysis, a spatially-varying heat transfer coefficient was evident, the magnitude of which was orders of magnitude larger than what is typically applied to macro-objects operating in similar environmental conditions. The latter phenomenon was correlated with similar findings in the literature.

Theoretical Thermal-Mechanical Modelling and Experimental Validation of a Three-Dimensional (3D) Electrothermal Microgripper with Three Fingers

This paper presents the theoretical thermal-mechanical modeling and parameter analyses of a novel three-dimensional (3D) electrothermal microgripper with three fingers. Each finger of the microgripper is composed of a bi-directional Z-shaped electrothermal actuator and a 3D U-shaped electrothermal actuator. The bi-directional Z-shaped electrothermal actuator provides the rectilinear motion in two directions. The novel 3D U-shaped electrothermal actuator offers motion with two degrees of freedom (DOFs) in the plane perpendicular to the movement of the Z-shaped actuator. As a result, each finger possesses 3D mobilities with three DOFs. Each beam of the actuators is heated externally with polyimide films. In this work, the static theoretical thermal-mechanical model of the 3D U-shaped electrothermal actuator is established. Finite-element analyses and experimental tests are conducted to verify and validate the model. With this model, parameter analyses are carried out to provide insight and guidance on further improving the 3D U-shaped actuator. Furthermore, a group of micro-manipulation experiments are conducted to demonstrate the flexibility and versality of the 3D microgripper on manipulate different types of small/micro-objects.

Design, Fabrication, and Testing of a Novel 3D 3-Fingered Electrothermal Microgripper with Multiple Degrees of Freedom

This paper presents the design, fabrication, and testing of a novel three-dimensional (3D) three-fingered electrothermal microgripper with multiple degrees of freedom (multi DOFs). Each finger of the microgripper is composed of a V-shaped electrothermal actuator providing one DOF, and a 3D U-shaped electrothermal actuator offering two DOFs in the plane perpendicular to the movement of the V-shaped actuator. As a result, each finger possesses 3D mobilities with three DOFs. Each beam of the actuators is heated externally with the polyimide film. The durability of the polyimide film is tested under different voltages. The static and dynamic properties of the finger are also tested. Experiments show that not only can the microgripper pick and place microobjects, such as micro balls and even highly deformable zebrafish embryos, but can also rotate them in 3D space.