Development of extreme microanalysis technology for metallic impurity on a silicon wafer surface

2018 ◽  
Author(s):  
Syuhei Yonezawa ◽  
Kazuya Dobashi ◽  
Shigeyuki ◽  
Iwai ◽  
Tatsuya Ichinose ◽  
...  
Keyword(s):  
Silicon Wafer ◽  
Metallic Impurity ◽  
Wafer Surface ◽  
Silicon Wafer Surface

Characterization of Crystal Quality by Crystal Originated Particle Delineation and the Impact on the Silicon Wafer Surface

1998 ◽  
Vol 145 (1) ◽  
pp. 275-284 ◽  
Author(s):  
D. Gräf ◽  
M. Suhren ◽  
U. Lambert ◽  
R. Schmolke ◽  
A. Ehlert ◽  
...  
Keyword(s):  
Silicon Wafer ◽  
Crystal Quality ◽  
Wafer Surface ◽  
Silicon Wafer Surface ◽  
The Impact

Clean Silicon Wafer Surface by a Slight Etch Method

1988 ◽  
Author(s):  
Ritsuo Takizawa ◽  
Toshiro Nakanishi ◽  
Kouichirou Honda ◽  
Akira Ohsawa
Keyword(s):  
Silicon Wafer ◽  
Wafer Surface ◽  
Silicon Wafer Surface

Analysis of the Reactant Gas Flow and Heat Transfer on the Silicon Wafer Surface Arranged in a Row in Heating Furnace

2002 ◽  
Vol 2002 (0) ◽  
pp. 275-276
Author(s):  
Naoko SAITO ◽  
Kazushige KIKUTA ◽  
Yukio HISHINUMA ◽  
Takemi CHIKAHISA ◽  
Toshimitsu MIYATA ◽  
...  
Keyword(s):  
Heat Transfer ◽  
Silicon Wafer ◽  
Gas Flow ◽  
Heating Furnace ◽  
Wafer Surface ◽  
Flow And Heat Transfer ◽  
Silicon Wafer Surface
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