Polarity control of (0001) oriented AlN films by Si doping and applications to polarity inverted SiAlN/AlN film bulk acoustic wave resonators
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Aln Film
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2012 ◽
2009 ◽
Vol 56
(8)
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pp. 1731-1744
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2010 ◽
Vol 157
(12)
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pp. J419
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