damascene interconnects
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Structural stability of tight-pitched damascene interconnects

2020 ◽  
Author(s):  
Sagarika Mukesh ◽  
Nicholas A. Lanzillo ◽  
Koichi Motayama ◽  
Terry Spooner
Keyword(s):  
Structural Stability ◽  
Damascene Interconnects

Electroless Copper Deposition on Ruthenium for Damascene Interconnects

2019 ◽  
Vol 6 (8) ◽  
pp. 179-184 ◽  
Author(s):  
Qingyun Chen ◽  
Xuan Lin ◽  
C. Valvede ◽  
V. Paneccasio ◽  
R. Hurtubise ◽  
...  
Keyword(s):  
Copper Deposition ◽  
Electroless Copper ◽  
Damascene Interconnects

Effect of pulsed electric fields on dielectric breakdown in Cu damascene interconnects

2015 ◽  
Vol 8 (3) ◽  
pp. 031502 ◽  
Author(s):  
Han-Wool Yeon ◽  
Jun-Young Song ◽  
Seung-Min Lim ◽  
Jang-Yong Bae ◽  
Yuchul Hwang ◽  
...  
Keyword(s):  
Electric Fields ◽  
Dielectric Breakdown ◽  
Pulsed Electric Fields ◽  
Damascene Interconnects

scholarly journals Effect of Dynamic Electric Fields on Dielectric Reliability in Cu Damascene Interconnects

2014 ◽  
Vol 21 (4) ◽  
pp. 111-115
Author(s):  
Han-Wool Yeon ◽  
Jun-Young Song ◽  
Seung-Min Lim ◽  
Jang-Yong Bae ◽  
Yuchul Hwang ◽  
...  
Keyword(s):  
Electric Fields ◽  
Damascene Interconnects

Effect of layout on electromigration characteristics in copper dual damascene interconnects

2014 ◽  
Vol 128 ◽  
pp. 19-23
Author(s):  
Y.L. Cheng ◽  
Y.M. Chang ◽  
Jihperng Leu ◽  
T.C. Bo ◽  
Y.L. Wang
Keyword(s):  
Dual Damascene ◽  
Damascene Interconnects
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