scholarly journals Machine learning-based virtual metrology on film thickness in amorphous carbon layer deposition process

2021 ◽  
Vol 16 ◽  
pp. 100046
Author(s):  
Jeong Eun Choi ◽  
Sang Jeen Hong
Keyword(s):  
Machine Learning ◽  
Film Thickness ◽  
Amorphous Carbon ◽  
Deposition Process ◽  
Carbon Layer ◽  
Virtual Metrology ◽  
Layer Deposition ◽  
Amorphous Carbon Layer

Amorphous carbon layer deposition on plastic film by PSII

2002 ◽  
Vol 420-421 ◽  
pp. 253-258 ◽  
Author(s):  
S Watanabe ◽  
M Shinohara ◽  
H Kodama ◽  
T Tanaka ◽  
M Yoshida ◽  
...  
Keyword(s):  
Amorphous Carbon ◽  
Carbon Layer ◽  
Plastic Film ◽  
Layer Deposition ◽  
Amorphous Carbon Layer

Amorphous carbon layer contributing Li storage capacity to Nb2O5@C nanosheets

RSC Advances ◽  
2015 ◽  
Vol 5 (45) ◽  
pp. 36104-36107 ◽  
Author(s):  
Lei Wang ◽  
Boyang Ruan ◽  
Jiantie Xu ◽  
Hua Kun Liu ◽  
Jianmin Ma
Keyword(s):  
Amorphous Carbon ◽  
Storage Capacity ◽  
High Capacity ◽  
Carbon Layer ◽  
Large Capacity ◽  
Li Storage ◽  
Amorphous Carbon Layer

The high-capacity of Nb2O5 nanosheets has been successfully realized through introducing amorphous carbon layers, which have been demonstrated to have a large capacity owing to the existence of defects on amorphous carbon layers.

Diamond-like amorphous carbon layer film by an inductively coupled plasma system for next generation etching hard mask

2018 ◽  
Vol 663 ◽  
pp. 21-24 ◽  
Author(s):  
Se Jun Park ◽  
Dohyung Kim ◽  
Seungmoo Lee ◽  
Yongjoon Ha ◽  
Mingyoo Lim ◽  
...  
Keyword(s):  
Amorphous Carbon ◽  
Inductively Coupled Plasma ◽  
Carbon Layer ◽  
Next Generation ◽  
Plasma System ◽  
Layer Film ◽  
Hard Mask ◽  
Inductively Coupled ◽  
Amorphous Carbon Layer

Defect Structure of Diamond Film at the Interface with Amorphous Carbon

1992 ◽  
Vol 270 ◽  
Author(s):  
Li Chang
Keyword(s):  
Amorphous Carbon ◽  
Microwave Plasma ◽  
Chemical Vapor ◽  
Amorphous Layer ◽  
Carbon Layer ◽  
Silicon Substrates ◽  
Plasma Chemical Vapor Deposition ◽  
Diamond Crystals ◽  
Transmission Electron ◽  
Amorphous Carbon Layer

ABSTRACTDiamond films prepared by microwave plasma chemical vapor deposition, using a gas mixture of methane and hydrogen with ethanol, were formed on silicon substrates. Highresolution transmission electron microscopy was employed to characterize the microstructure at interface regions. It was found that the diamond crystals were grown on an amorphous carbon layer. Twins and stacking faults were observed at the regions interfaced with the amorphous carbon layer, suggesting that the defects may already exist in the nucleation stage and at the very first stage of growth. Also, some diamond nuclei embedded in the amorphous layer were observed.

Formation of a highly doped ultra-thin amorphous carbon layer by ion bombardment of graphene

2018 ◽  
Vol 29 (30) ◽  
pp. 305302 ◽  
Author(s):  
Paweł Piotr Michałowski ◽  
Iwona Pasternak ◽  
Paweł Ciepielewski ◽  
Francisco Guinea ◽  
Włodek Strupiński
Keyword(s):  
Amorphous Carbon ◽  
Ion Bombardment ◽  
Carbon Layer ◽  
Amorphous Carbon Layer

Electrical Characterization of N- and B- Doped Amorphous Carbon Film from Palmyra Sugar

2020 ◽  
Vol 860 ◽  
pp. 196-201
Author(s):  
Khoirotun Nadiyyah ◽  
Anna Zakiyatul Laila ◽  
Irma Septi Ardiani ◽  
Budhi Priyanto ◽  
Darminto
Keyword(s):  
Electrical Conductivity ◽  
Film Thickness ◽  
Amorphous Carbon ◽  
Deposition Time ◽  
Carbon Film ◽  
Electrical Characterization ◽  
Deposition Process ◽  
Basic Material ◽  
Heating Process ◽  
P Type

Structure of amorphous carbon can be composed of sp2 (graphite), or sp3 (diamond), or a combination of both, depending on their fractions. Therefore, many researchers were exploring to use it as solar cell material. This research used the amorphous carbon of bio-product as a basic material in the form of palmyra sugar which was synthesized through the heating and doping process to produce n-type and p-type semiconductors. This research aims to analyze the effect of dopant and deposition time on electrical properties. The heating process was carried out at 250°C and the doping process was carried out by adding NH4OH for a-C:N and H3BO3 for a-C:B. The deposition process was carried out by the nano-spray method using a variety of deposition time on the ITO substrate. The result of scanning electron microscopy (SEM) showed that the film thickness increased with the increase of deposition time. Besides, the result of four-point probe (FPP) showed that the dopant can increase electrical conductivity, but the film thickness did not influence it. The electrical conductivity obtained was 5x10-1 - 6x10-1 S/cm. And the result of further analysis, it can be concluded that electrical conductivity was still in the range of semiconducting material.

Graphitic Disks or Polygons? Faceting of Graphite Disks

1998 ◽  
Vol 4 (S2) ◽  
pp. 708-709
Author(s):  
A. Krishnan ◽  
E. Dujardin ◽  
T.W. Ebbesen ◽  
M.M.J. Treacy
Keyword(s):  
Amorphous Carbon ◽  
Carbon Layer ◽  
Nucleation And Growth ◽  
Growth Mechanisms ◽  
Additional Insight ◽  
Structural Peculiarities ◽  
Carbon Soot ◽  
20 Nm ◽  
Insight Into ◽  
Amorphous Carbon Layer

The recent discovery of graphite cones [1,2] has raised some interesting questions about the nucleation and growth of curved graphitic structures. Here we report the structural peculiarities of one member of the ensemble, i.e. the flat graphite disks. Unlike graphite flakes seen in carbon soot which are irregularly shaped, the disks in this sample often show regular faceting which might give us additional insight into the growth mechanisms.The samples were examined in a Hitachi H9000 NAR TEM. Samples were sonicated in high purity methanol and dispersed on a 300 mesh Cu grid coated with a 20 nm thick amorphous carbon layer. Typical disk diameters range from 0.5 to 3.0 μm, with thickness ranging from 10 nm to 50 nm.A close examination reveals that the edges of the disks are faceted and typically have 12 sides. In most cases, the edges show a long facet alternating with a shorter facet.

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