Automatic Virtual Metrology (AVM)

2021 ◽

Author(s):

Taki Eddine KORABI ◽

Valeria BORODIN ◽

Michel JUGE ◽

Agnes ROUSSY

Keyword(s):

Feature Selection ◽

Virtual Metrology ◽

Selection Approach ◽

Feature Selection Approach

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Machine learning-based virtual metrology on film thickness in amorphous carbon layer deposition process

Measurement: Sensors ◽

10.1016/j.measen.2021.100046 ◽

2021 ◽

Vol 16 ◽

pp. 100046

Author(s):

Jeong Eun Choi ◽

Sang Jeen Hong

Keyword(s):

Machine Learning ◽

Film Thickness ◽

Amorphous Carbon ◽

Deposition Process ◽

Carbon Layer ◽

Virtual Metrology ◽

Layer Deposition ◽

Amorphous Carbon Layer

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Enhancing Scalability of Virtual Metrology: A Deep Learning-Based Approach for Domain Adaptation

2020 Winter Simulation Conference (WSC) ◽

10.1109/wsc48552.2020.9383945 ◽

2020 ◽

Author(s):

Natalie Gentner ◽

Andreas Kyek ◽

Yao Yang ◽

Mattia Carletti ◽

Gian Antonio Susto

Keyword(s):

Deep Learning ◽

Domain Adaptation ◽

Virtual Metrology

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What are the Most Informative Data for Virtual Metrology? A use case on Multi-Stage Processes Fault Prediction

2019 IEEE 15th International Conference on Automation Science and Engineering (CASE) ◽

10.1109/coase.2019.8842942 ◽

2019 ◽

Author(s):

Marco Maggipinto ◽

Gian Antonio Susto ◽

Federico Zocco ◽

Sean McLoone

Keyword(s):

Fault Prediction ◽

Use Case ◽

Virtual Metrology ◽

Multi Stage

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Virtual metrology for TSV etch depth measurement using optical emission spectroscopy

2015 IEEE Electrical Design of Advanced Packaging and Systems Symposium (EDAPS) ◽

10.1109/edaps.2015.7383700 ◽

2015 ◽

Cited By ~ 1

Author(s):

Ja Myung Gu ◽

Sang Jeen Hong

Keyword(s):

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Etch Depth ◽

Depth Measurement ◽

Virtual Metrology

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A virtual equipment as a test bench for evaluating Virtual Metrology algorithms

Proceedings of the 2011 Winter Simulation Conference (WSC) ◽

10.1109/wsc.2011.6147902 ◽

2011 ◽

Cited By ~ 1

Author(s):

Andreas Mattes ◽

Matthias Koitzsch ◽

Dirk Lewke ◽

Michael Muller-Zell ◽

Martin Schellenberger

Keyword(s):

Test Bench ◽

Virtual Metrology

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Multivariate simulation assessment for virtual metrology

Proceedings 2006 IEEE International Conference on Robotics and Automation, 2006. ICRA 2006. ◽

10.1109/robot.2006.1641848 ◽

2006 ◽

Cited By ~ 4

Author(s):

Yeh-Tung Chen ◽

Haw-Ching Yang ◽

Fan-Tien Cheng

Keyword(s):

Virtual Metrology ◽

Multivariate Simulation

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Virtual Metrology for Etch Profile in Silicon Trench Etching with SF6/O2/Ar Plasma

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2021.3138918 ◽

2021 ◽

pp. 1-1

Author(s):

Jeong Eun Choi ◽

Hyoeun Park ◽

Yongho Lee ◽

Sang Jeen Hong

Keyword(s):

Virtual Metrology ◽

Ar Plasma ◽

Etch Profile

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Preliminary study of run-to-run control utilizing virtual metrology with reliance index

2011 IEEE International Conference on Automation Science and Engineering ◽

10.1109/case.2011.6042446 ◽

2011 ◽

Cited By ~ 6

Author(s):

Chi-An Kao ◽

Fan-Tien Cheng ◽

Wei-Ming Wu

Keyword(s):

Virtual Metrology ◽

Preliminary Study

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A novel automatic virtual metrology system architecture for TFT-LCD industry based on main memory database

Robotics and Computer-Integrated Manufacturing ◽

10.1016/j.rcim.2012.01.002 ◽

2012 ◽

Vol 28 (4) ◽

pp. 559-568 ◽

Cited By ~ 9

Author(s):

Min-Hsiung Hung ◽

Wen-Huang Tsai ◽

Haw-Ching Yang ◽

Yi-Jhong Kao ◽

Fan-Tien Cheng

Keyword(s):

System Architecture ◽

Main Memory ◽

Virtual Metrology ◽

Main Memory Database ◽

Metrology System

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Automatic Virtual Metrology (AVM)

A hybrid feature selection approach for virtual metrology: Application to CMP process

Machine learning-based virtual metrology on film thickness in amorphous carbon layer deposition process

Enhancing Scalability of Virtual Metrology: A Deep Learning-Based Approach for Domain Adaptation

What are the Most Informative Data for Virtual Metrology? A use case on Multi-Stage Processes Fault Prediction

Virtual metrology for TSV etch depth measurement using optical emission spectroscopy

A virtual equipment as a test bench for evaluating Virtual Metrology algorithms

Multivariate simulation assessment for virtual metrology

Virtual Metrology for Etch Profile in Silicon Trench Etching with SF6/O2/Ar Plasma

Preliminary study of run-to-run control utilizing virtual metrology with reliance index

A novel automatic virtual metrology system architecture for TFT-LCD industry based on main memory database

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