Properties of Inductivety-Coupled RF Plasmas Sustained with Internal Antenna for Deposition of Carbon-Related Films

2011 ◽  
pp. 413-417
Author(s):  
Kosuke Takenaka ◽  
Yuichi Setsuhara ◽  
Kazuaki Nishisaka ◽  
Akinori Ebe
Keyword(s):  
Rf Plasmas ◽  
Internal Antenna

Plasma surface treatment of polymers with inductivity-coupled RF plasmas driven by low-inductance antenna units

2009 ◽  
Vol 518 (3) ◽  
pp. 1006-1011 ◽  
Author(s):  
Yuichi Setsuhara ◽  
Ken Cho ◽  
Kosuke Takenaka ◽  
Akinori Ebe ◽  
Masaharu Shiratani ◽  
...  
Keyword(s):  
Surface Treatment ◽  
Rf Plasmas ◽  
Plasma Surface ◽  
Plasma Surface Treatment

Diagnostics of N2dissociation in RF plasmas by vacuum ultraviolet emission and absorption spectroscopy

2008 ◽  
Vol 17 (2) ◽  
pp. 024018 ◽  
Author(s):  
Takeshi Kitajima ◽  
Toshiki Nakano ◽  
Seiji Samukawa ◽  
Toshiaki Makabe
Keyword(s):  
Absorption Spectroscopy ◽  
Vacuum Ultraviolet ◽  
Ultraviolet Emission ◽  
Rf Plasmas

Discharge profiles of internal-antenna-driven inductively-coupled plasmas

2008 ◽  
Vol 202 (22-23) ◽  
pp. 5234-5237 ◽  
Author(s):  
Yuichi Setsuhara ◽  
Takashi Sera ◽  
Kosuke Takenaka
Keyword(s):  
Inductively Coupled Plasmas ◽  
Inductively Coupled ◽  
Coupled Plasmas ◽  
Internal Antenna

scholarly journals Rare Gas Metastable Atom Density in Diluted O2 RF Plasmas

2006 ◽  
Vol 126 (1) ◽  
pp. 37-42
Author(s):  
Takeshi Kitajima ◽  
Kei Takahashi ◽  
Toshiki Nakano ◽  
Toshiaki Makabe
Keyword(s):  
Metastable Atom ◽  
Rare Gas ◽  
Rf Plasmas ◽  
Atom Density

An analysis of LTE effects in inductively coupled RF plasmas

1989 ◽  
Vol 22 (10) ◽  
pp. 1471-1477 ◽  
Author(s):  
D V Gravelle ◽  
M Beaulieu ◽  
M I Boulos ◽  
A Gleizes
Keyword(s):  
Rf Plasmas ◽  
Inductively Coupled
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