Intermediate Phase‐Change States with Improved Cycling Durability of Sb 2 S 3 by Femtosecond Multi‐Pulse Laser Irradiation

Deposits of nitrides and oxides of Al and Ti have been produced by laser irradiation of Al and Ti targets in air, N2, and NH3 + N2 gases. Microstructure and constituent phases in these deposits have been examined by scanning electron microscopy (SEM), transmission electron microscopy (TEM), and x-ray diffractometry (XRD). The distribution of metalloid elements has been investigated by Rutherford backscattering spectrometry (RBS). On the basis of the results of these examinations, the nitride and oxide deposits have been shown to be formed by reactions between ambient gas and metal-melt or metal-vapor which take place during pulse laser irradiation.

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The thermal-stress accumulation in anti-reflective coatings with multi-pulse laser irradiation

Optics Communications ◽

10.1016/j.optcom.2015.04.009 ◽

2015 ◽

Vol 350 ◽

pp. 263-269 ◽

Cited By ~ 2

Author(s):

Du Lifeng ◽

Zhu Xiaobing ◽

Zhang Rongzhu

Keyword(s):

Thermal Stress ◽

Laser Irradiation ◽

Pulse Laser ◽

Pulse Laser Irradiation ◽

Reflective Coatings ◽

Stress Accumulation

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Electron microscopy of voids in Si formed by permeable pulse laser irradiation

Journal of Electron Microscopy ◽

10.1093/jmicro/dfx024 ◽

2017 ◽

Vol 66 (5) ◽

pp. 328-336 ◽

Cited By ~ 5

Author(s):

Hiroyuki Iwata ◽

Daisuke Kawaguchi ◽

Hiroyasu Saka

Keyword(s):

Electron Microscopy ◽

Laser Irradiation ◽

Pulse Laser ◽

Pulse Laser Irradiation

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Characterization of regular periodic surface structure by multi-pulse laser irradiation of a Zinc target

Chinese Optics Letters ◽

10.3788/col201210.051402 ◽

2012 ◽

Vol 10 (5) ◽

pp. 051402-51404 ◽

Cited By ~ 4

Author(s):

Ming Chen Ming Chen ◽

Xiangdong Liu Xiangdong Liu ◽

Yuehua Liu Yuehua Liu ◽

Mingwen Zhao Mingwen Zhao

Keyword(s):

Surface Structure ◽

Laser Irradiation ◽

Pulse Laser ◽

Pulse Laser Irradiation ◽

Periodic Surface ◽

Periodic Surface Structure

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Change in the microstructure of ultrafine-grained aluminum alloys 1420 and 1421 under the action of pulse laser irradiation

Metal Science and Heat Treatment ◽

10.1007/s11041-009-9171-3 ◽

2009 ◽

Vol 51 (7-8) ◽

pp. 346-348 ◽

Cited By ~ 2

Author(s):

P. Yu. Kikin ◽

A. I. Pchelintsev ◽

E. E. Rusin ◽

N. V. Zemlyakova

Keyword(s):

Aluminum Alloys ◽

Laser Irradiation ◽

Pulse Laser ◽

Pulse Laser Irradiation ◽

Ultrafine Grained

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Laser Induced Metal and Alloy Plating with Simultaneous Silicide Compound Formation

MRS Proceedings ◽

10.1557/proc-71-387 ◽

1986 ◽

Vol 71 ◽

Cited By ~ 3

Author(s):

J. Zahavi ◽

S. Tamir ◽

M. Halliwell

Keyword(s):

Laser Irradiation ◽

Pulse Laser ◽

Silicon Substrates ◽

Pulse Laser Irradiation ◽

Compound Formation ◽

Si Substrates ◽

Gaas Substrates ◽

Irradiation Energy ◽

Nickel Deposits ◽

Behavior Contracts

AbstractHighly selective metal and alloy deposition with simultaneous silicide formation - on semiconductor substrates immersed in commercial electroplating solutions has been investigated via pulse laser irradiation without masking procedures and external electric current.Specimens of 5i and GaAs substrates, immersed in gold and in palladiumnickel electroplating solutions, were irradiated by a Qswitch YAG pulse laser perpendicular to their surfaces at predesired local zones. The gold, palladium and nickel deposits thus obtained were subsequently examined and characterised by SEM, TEM, AES, ESCA and RBS.Deposit thickness ranged from a few hundred angstroms to several micrometers, depending primarily on the laser irradiation energy. The elemental Gold deposit exhibited Schottky barrier contacts with the GaAs and Si substrates. Palladium and nickel silicides obtained on n-type silicon substrates likewise exhibited Schottky behavior contracts.

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