Atomic Layer Deposition of Functional Layers for on Chip 3D Li-Ion All Solid State Microbattery

2016 ◽  
Vol 7 (2) ◽  
pp. 1601402 ◽  
Author(s):  
Manon Létiche ◽  
Etienne Eustache ◽  
Jeremy Freixas ◽  
Arnaud Demortière ◽  
Vincent De Andrade ◽  
...  
2013 ◽  
Vol 160 (5) ◽  
pp. A3066-A3071 ◽  
Author(s):  
M. E. Donders ◽  
W. M. Arnoldbik ◽  
H. C. M. Knoops ◽  
W. M. M. Kessels ◽  
P. H. L. Notten

2017 ◽  
Vol 29 (8) ◽  
pp. 3740-3753 ◽  
Author(s):  
Alexander J. Pearse ◽  
Thomas E. Schmitt ◽  
Elliot J. Fuller ◽  
Farid El-Gabaly ◽  
Chuan-Fu Lin ◽  
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2014 ◽  
Vol 2 (36) ◽  
pp. 15044-15051 ◽  
Author(s):  
Erik Østreng ◽  
Knut Bjarne Gandrud ◽  
Yang Hu ◽  
Ola Nilsen ◽  
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Atomic layer deposition (ALD) has been used to prepare nano-structured cathode films for Li-ion batteries of V2O5 from VO(thd)2 and ozone at 215 °C.


2015 ◽  
Vol 26 (6) ◽  
pp. 064002 ◽  
Author(s):  
Giuseppe Fiorentino ◽  
Sten Vollebregt ◽  
F D Tichelaar ◽  
Ryoichi Ishihara ◽  
Pasqualina M Sarro

2015 ◽  
Vol 7 (24) ◽  
pp. 13154-13163 ◽  
Author(s):  
B. Ahmed ◽  
Muhammad Shahid ◽  
D. H. Nagaraju ◽  
D. H. Anjum ◽  
Mohamed N. Hedhili ◽  
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2018 ◽  
Vol 30 (8) ◽  
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Author(s):  
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Alexander J. Pearse ◽  
Nam S. Kim ◽  
Elliot J. Fuller ◽  
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2010 ◽  
Vol 22 (19) ◽  
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Author(s):  
Yoon Seok Jung ◽  
Andrew S. Cavanagh ◽  
Leah A. Riley ◽  
Sun-Ho Kang ◽  
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