Plasma Diagnostics in a Hollow Cathode arc Evaporation System During TinX-Deposition
1990 ◽
Vol 30
(5)
◽
pp. 637-648
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2000 ◽
Vol 123
(2-3)
◽
pp. 231-238
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1991 ◽
Vol 140
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pp. 666-669
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1997 ◽
Vol 92
(1-2)
◽
pp. 96-103
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1996 ◽
Vol 5
(11)
◽
pp. 1270-1274
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1991 ◽
Vol 33
(12)
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pp. 1371-1380
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Keyword(s):
1997 ◽
Vol 36
(Part 2, No. 10B)
◽
pp. L1406-L1409
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Keyword(s):
2019 ◽
Vol 17
(1)
◽
pp. 90-95
Keyword(s):