Molecular Layer Deposition of Hybrid Organic-Inorganic Polymer Films using Diethylzinc and Ethylene Glycol

In MLD of alucone using trimethylaluminum (TMA) and ethylene glycol (EG), TMA is known to infiltrate into the MLD film taking very long to outgas. An insufficient purge can then lead to an additional CVD component in the overall growth.

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Caprolactone Ring-Opening Molecular Layer Deposition of Organic-Aluminum Oxide Polymer Films

ECS Journal of Solid State Science and Technology ◽

10.1149/2.023204jss ◽

2012 ◽

Vol 1 (4) ◽

pp. P210-P215 ◽

Cited By ~ 6

Author(s):

Bo Gong ◽

Gregory N. Parsons

Keyword(s):

Aluminum Oxide ◽

Polymer Films ◽

Ring Opening ◽

Molecular Layer ◽

Molecular Layer Deposition ◽

Layer Deposition

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Polymer films formed with monolayer growth steps by molecular layer deposition

Applied Physics Letters ◽

10.1063/1.105415 ◽

1991 ◽

Vol 59 (4) ◽

pp. 482-484 ◽

Cited By ~ 153

Author(s):

Tetsuzo Yoshimura ◽

Satoshi Tatsuura ◽

Wataru Sotoyama

Keyword(s):

Polymer Films ◽

Molecular Layer ◽

Molecular Layer Deposition ◽

Layer Deposition ◽

Monolayer Growth

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Continuous polymer films deposited on top of porous substrates using plasma-enhanced atomic layer deposition and molecular layer deposition

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/6.0000271 ◽

2020 ◽

Vol 38 (5) ◽

pp. 052409

Author(s):

Brian C. Welch ◽

Olivia M. McIntee ◽

Anand B. Ode ◽

Bonnie B. McKenzie ◽

Alan R. Greenberg ◽

...

Keyword(s):

Atomic Layer Deposition ◽

Polymer Films ◽

Molecular Layer ◽

Atomic Layer ◽

Molecular Layer Deposition ◽

Layer Deposition ◽

Porous Substrates

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Nanocoating hybrid polymer films on large quantities of cohesive nanoparticles by molecular layer deposition

AIChE Journal ◽

10.1002/aic.11757 ◽

2009 ◽

Vol 55 (4) ◽

pp. 1030-1039 ◽

Cited By ~ 44

Author(s):

Xinhua Liang ◽

David M. King ◽

Peng Li ◽

Steven M. George ◽

Alan W. Weimer

Keyword(s):

Polymer Films ◽

Molecular Layer ◽

Hybrid Polymer ◽

Molecular Layer Deposition ◽

Layer Deposition

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Molecular Layer Deposition of Hybrid Organic−Inorganic Alucone Polymer Films Using a Three-Step ABC Reaction Sequence

Chemistry of Materials ◽

10.1021/cm9013267 ◽

2009 ◽

Vol 21 (22) ◽

pp. 5365-5374 ◽

Cited By ~ 79

Author(s):

Byunghoon Yoon ◽

Dragos Seghete ◽

Andrew S. Cavanagh ◽

Steven M. George

Keyword(s):

Polymer Films ◽

Molecular Layer ◽

Reaction Sequence ◽

Molecular Layer Deposition ◽

Layer Deposition

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Quantum Well Formation in One-Dimensional Polymer Films by Molecular Layer Deposition and Chemical Vapor Deposition

MRS Proceedings ◽

10.1557/proc-247-829 ◽

1992 ◽

Vol 247 ◽

Cited By ~ 1

Author(s):

Tetsuzo Yoshimura ◽

Satoshi Tatsuura ◽

Wataru Sotoyama

Keyword(s):

Chemical Vapor Deposition ◽

Polymer Films ◽

Vapor Deposition ◽

Conjugated Polymer ◽

Quantum Wires ◽

Molecular Layer ◽

Chemical Vapor ◽

Molecular Layer Deposition ◽

One Dimensional ◽

Layer Deposition

ABSTRACTQuantum wires and dots were fabricated in one-dimensional conjugated polymer films by chemical vapor deposition. In the wires, a sharp exciton absorption peak, and in the dots, a blue shift in the absorption band due to electron confinement were observed. We showed that acceptors could be substituted into the conjugated polymer chain. We also demonstrated that molecular layer deposition (MLD), in which molecules are stacked on substrates one by one in order of preference in a vacuum, is feasible in fabricating one-dimensional conjugated polymers.

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