Comparison on atomic/molecular layer deposition grown aluminum alkoxide polymer films using alkane and alkyne organic precursors
2018 ◽
Vol 36
(1)
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pp. 01A108
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2012 ◽
Vol 1
(4)
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pp. P210-P215
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2020 ◽
Vol 38
(5)
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pp. 052409
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2009 ◽
Vol 57
(17)
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pp. 5083-5092
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2009 ◽
Vol 15
(4-6)
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pp. 112-121
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