A highly efficient surface modified separator fabricated with atmospheric atomic layer deposition for high temperature lithium ion batteries

2020 ◽  
Vol 44 (8) ◽  
pp. 7035-7046 ◽  
Author(s):  
Jae‐Wook Lee ◽  
Afaque Manzoor Soomro ◽  
Muhammad Waqas ◽  
Muhammad A. U. Khalid ◽  
Kyung H. Choi
Keyword(s):  
High Temperature ◽  
Atomic Layer Deposition ◽  
Lithium Ion Batteries ◽  
Lithium Ion ◽  
Atomic Layer ◽  
Highly Efficient ◽  
Layer Deposition ◽  
Surface Modified ◽  
Modified Separator

Plasma Enhanced Atomic Layer Deposition of Nickel and Cobalt Phosphate for Lithium Ion Batteries

2022 ◽  
Author(s):  
Lowie Henderick ◽  
Ruben Blomme ◽  
Matthias Marcus Minjauw ◽  
Jonas Keukelier ◽  
Johan Meersschaut ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Substrate Temperature ◽  
Lithium Ion Batteries ◽  
Oxygen Plasma ◽  
Lithium Ion ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Nickel Phosphate ◽  
Cobalt Phosphate

A plasma-enhanced ALD process has been developed to deposit nickel phosphate. The process combines a trimethylphosphate (TMP) plasma with an oxygen plasma and nickelocene at a substrate temperature of 300°C....

Sign in / Sign up

Export Citation Format

Share Document