nickel phosphate
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2022 ◽  
Author(s):  
Lowie Henderick ◽  
Ruben Blomme ◽  
Matthias Marcus Minjauw ◽  
Jonas Keukelier ◽  
Johan Meersschaut ◽  
...  

A plasma-enhanced ALD process has been developed to deposit nickel phosphate. The process combines a trimethylphosphate (TMP) plasma with an oxygen plasma and nickelocene at a substrate temperature of 300°C....


2021 ◽  
Vol 280 ◽  
pp. 116876
Author(s):  
Sachin S. Pujari ◽  
Vinod V. Patil ◽  
Akash S. Patil ◽  
Vinayak G. Parale ◽  
Hyung-Ho Park ◽  
...  

Author(s):  
Supriya J. Marje ◽  
Prashant R. Deshmukh ◽  
Jayavant L. Gunjakar ◽  
Chandrakant D. Lokhande ◽  
Umakant M. Patil

Author(s):  
Neeta Gurbani ◽  
Neelu Chouhan ◽  
Ram Janay Choudhary ◽  
D.M. Phase ◽  
Kazuhiro Marumoto ◽  
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