Titanium Dioxide/Lithium Phosphate Nanocomposite Derived from Atomic Layer Deposition as a High-Performance Anode for Lithium Ion Batteries

2016 ◽  
Vol 3 (21) ◽  
pp. 1600369 ◽  
Author(s):  
Biqiong Wang ◽  
Jian Liu ◽  
Qian Sun ◽  
Biwei Xiao ◽  
Ruying Li ◽  
...  
Keyword(s):  
Titanium Dioxide ◽  
Atomic Layer Deposition ◽  
Lithium Ion Batteries ◽  
High Performance ◽  
Lithium Ion ◽  
Atomic Layer ◽  
Lithium Phosphate ◽  
Layer Deposition

An alumina stabilized ZnO–graphene anode for lithium ion batteries via atomic layer deposition

Nanoscale ◽  
2014 ◽  
Vol 6 (19) ◽  
pp. 11419-11424 ◽  
Author(s):  
Mingpeng Yu ◽  
Aiji Wang ◽  
Yinshu Wang ◽  
Chun Li ◽  
Gaoquan Shi
Keyword(s):  
Atomic Layer Deposition ◽  
Lithium Ion Batteries ◽  
Anode Material ◽  
High Performance ◽  
Lithium Ion ◽  
Atomic Layer ◽  
Alumina Coating ◽  
Graphene Aerogel ◽  
Layer Deposition ◽  
Aerogel Composite

A ZnO–graphene aerogel composite was prepared by atomic layer deposition and further modified with an ultrathin alumina coating, exhibiting high-performance in lithium ion batteries as an anode material.

Plasma Enhanced Atomic Layer Deposition of Nickel and Cobalt Phosphate for Lithium Ion Batteries

2022 ◽  
Author(s):  
Lowie Henderick ◽  
Ruben Blomme ◽  
Matthias Marcus Minjauw ◽  
Jonas Keukelier ◽  
Johan Meersschaut ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Substrate Temperature ◽  
Lithium Ion Batteries ◽  
Oxygen Plasma ◽  
Lithium Ion ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Nickel Phosphate ◽  
Cobalt Phosphate

A plasma-enhanced ALD process has been developed to deposit nickel phosphate. The process combines a trimethylphosphate (TMP) plasma with an oxygen plasma and nickelocene at a substrate temperature of 300°C....

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