Comparison of photon transport efficiency in simple scintillation electron detector configurations for scanning electron microscope

Author(s):  
Petr Schauer
1997 ◽  
Vol 3 (S2) ◽  
pp. 385-386 ◽  
Author(s):  
Brendan J. Griffin

The environmental SEM is an extremely adaptive instrument, allowing a range of materials to be examined under a wide variety of conditions. The limitations of the instrument lie mainly with the restrictions imposed by the need to maintain a moderate vacuum around the electron gun. The primary effect of this has been, in a practical sense, the limited low magnification available. Recently this has been overcome by modifications to the final pressure limiting aperture and secondary electron detector (Fig.l). The modifications are simple and users should be brave in this regard.A variety of electron detectors now exist including various secondary, backscattered and cathodoluminescence systems (Figs 2-5). These provide an excellent range of options; the ESEM must be regarded as a conventional SEM in that a range of imaging options should be installed. In some cases, e.g. cathodoluminescence, the lack of coating provides an advantage unique to the low vacuum SEMs.


Scanning ◽  
2006 ◽  
Vol 19 (6) ◽  
pp. 387-395 ◽  
Author(s):  
William P. Wergin ◽  
Robert W. Yaklich ◽  
Stéphane Roym ◽  
David C. Joy ◽  
Eric F. Erbe ◽  
...  

1999 ◽  
Vol 5 (S2) ◽  
pp. 268-269
Author(s):  
T. A. Hardt ◽  
W. R. Knowles

The Environmental Scanning Electron Microscope, or ESEM, is the only class of SEM that can image in a gaseous environment that will maintain a sample in a fully wet state. The use of the patented Gaseous Secondary Electron Detector, or GSED, which amplifies the secondary electron signal with the gas, has allowed the ESEM to image a multitude of samples with true secondary contrast. Recently, several new modes of imaging in a gas have been developed and will allow further expansion of the capabilities of the ESEM.To maintain pressures in the ESEM up to 20 Torr (27 mbar), the use of multiple, differentially pumped apertures, is required. This can place a restriction on the low magnification range. In the large field detection mode, all magnification restrictions are removed. Magnifications as low as lOx may be achieved. This is similar to many conventional SEMs.


Author(s):  
P. S. D. Lin ◽  
M. K. Lamvik

Unlike a CEM or high resolution STEM, where the specimen is immersed between the pole pieces of the objective lens, a scanning electron microscope has its specimen stage situated off the lens field. After scattering with the specimen, electrons follow straight paths. It is rather simple to deduce the information from the signal. A transmission stage in a SEM is therefore a useful device for studying various scattering processes and the contrast thus generated.The transmission stage can also be used in connection with the investigation of secondary and backscattered electron emission phenomena. Previously, a back-scattered electron detector was installed in one of the scanning microscopes in the laboratory.


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