A novel photo-acid generator bound molecular glass resist with a single protecting group
2013 ◽
Vol 51
(9)
◽
pp. 1956-1962
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Keyword(s):
1997 ◽
Vol 62
(10)
◽
pp. 1642-1649
◽
Keyword(s):
2005 ◽
Vol 70
(12)
◽
pp. 2075-2085
◽
Keyword(s):
Keyword(s):