Particle-In-Cell/Monte-Carlo Simulation of Plasma and Neutral Gas Flow for the Inner Coating of PET Bottles by Plasma-Based Ion Implantation. N2 Gas Plasma

Plasma Processes and Polymers ◽

10.1002/ppap.200500008 ◽

2005 ◽

Vol 2 (6) ◽

pp. 480-484 ◽

Author(s):

Yoshiko Miyagawa ◽

Masaaki Tanaka ◽

Hiroshi Nakadate ◽

Masami Ikeyama ◽

Soji Miyagawa

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Ion Implantation ◽

Gas Flow ◽

Particle In Cell ◽

Pet Bottles ◽

Neutral Gas ◽

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Analysis of plasma and neutral gas flow inside of a PET bottle under PIII condition by particle-in-cell/Monte Carlo simulation

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/j.nimb.2005.08.049 ◽

2006 ◽

Vol 242 (1-2) ◽

pp. 341-345 ◽

Author(s):

Y. Miyagawa ◽

M. Tanaka ◽

M. Ikeyama ◽

S. Nakao ◽

J. Choi ◽

...

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Gas Flow ◽

Particle In Cell ◽

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Particle-in-cell and Monte Carlo simulation of the hydrogen plasma immersion ion implantation process

Journal of Applied Physics ◽

10.1063/1.370974 ◽

1999 ◽

Vol 86 (4) ◽

pp. 1817-1821 ◽

Author(s):

Dixon Tat-Kun Kwok ◽

Paul K. Chu ◽

Blake P. Wood ◽

Chung Chan

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Ion Implantation ◽

Hydrogen Plasma ◽

Particle In Cell ◽

Implantation Process ◽

Plasma Immersion Ion Implantation

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Monte Carlo simulation of ion implantation (3-dimensional) and defect modeling during implantation process

International Electron Devices Meeting. Technical Digest (Cat. No.01CH37224) ◽

10.1109/iedm.2001.979647 ◽

2002 ◽

Author(s):

D. Li ◽

L. Lin ◽

G. Wang ◽

Y. Chen ◽

G. Shrivastav ◽

...

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Ion Implantation ◽

Defect Modeling ◽

3 Dimensional ◽

Implantation Process

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Particle-in-cell/Monte Carlo simulation of electron and ion currents to cylindrical Langmuir probe

Contributions to Plasma Physics ◽

10.1002/ctpp.201800063 ◽

2018 ◽

Vol 59 (3) ◽

pp. 314-325 ◽

Author(s):

Petr Zikán ◽

Kristián Farkaš ◽

David Trunec ◽

Jaroslav Jánský ◽

Zdeněk Bonaventura

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Langmuir Probe ◽

Ion Currents ◽

Particle In Cell ◽

Cylindrical Langmuir Probe

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Study of scaling law for particle-in-cell/Monte Carlo simulation of low-temperature magnetized plasma for electric propulsion

Journal of Physics D Applied Physics ◽

10.1088/1361-6463/ab394b ◽

2019 ◽

Vol 52 (45) ◽

pp. 455203 ◽

Author(s):

Jian Li ◽

Jianjun Wu ◽

Yu Zhang ◽

Sheng Tan ◽

Yang Ou

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Low Temperature ◽

Electric Propulsion ◽

Scaling Law ◽

Magnetized Plasma ◽

Particle In Cell

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Two Dimensional Monte Carlo Simulation of Ion Implantation in Crystalline Silicon Considering Damage Formation

Simulation of Semiconductor Devices and Processes ◽

10.1007/978-3-7091-6657-4_89 ◽

1993 ◽

pp. 361-364

Author(s):

A. Simionescu ◽

G. Hobler

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Ion Implantation ◽

Crystalline Silicon ◽

Two Dimensional

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Uncertainty Assessment Using Monte Carlo Simulation in Gas Flow Measurement

Transactions of the Korean Society of Mechanical Engineers B ◽

10.3795/ksme-b.2003.27.12.1758 ◽

2003 ◽

Vol 27 (12) ◽

pp. 1758-1765 ◽

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Flow Measurement ◽

Gas Flow ◽

Uncertainty Assessment

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Monte Carlo Simulation for Ion Implantation Profiles, Amorphous Layer Thickness Formed by the Ion Implantation, and Database Based on Pearson Function

Applications of Monte Carlo Method in Science and Engineering ◽

10.5772/14539 ◽

2011 ◽

Author(s):

Kunihiro Suzuki

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Ion Implantation ◽

Layer Thickness ◽

Amorphous Layer

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A particle-in-cell Monte Carlo simulation of an rf discharge in methane: frequency and pressure features of the ion energy distribution function

Plasma Sources Science and Technology ◽

10.1088/0963-0252/15/3/015 ◽

2006 ◽

Vol 15 (3) ◽

pp. 402-409 ◽

Author(s):

O V Proshina ◽

T V Rakhimova ◽

A T Rakhimov

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Distribution Function ◽

Energy Distribution ◽

Energy Distribution Function ◽

Rf Discharge ◽

Ion Energy Distribution ◽

Particle In Cell

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Numerical Study of the Effects of Frequency in Inductively Coupled Plasma Using Particle-in-Cell/Monte Carlo Simulation

Japanese Journal of Applied Physics ◽

10.1143/jjap.39.1358 ◽

2000 ◽

Vol 39 (Part 1, No. 3A) ◽

pp. 1358-1364 ◽

Author(s):

Jin-Sung Oh ◽

Toshiaki Makabe

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Inductively Coupled Plasma ◽

Numerical Study ◽

Particle In Cell ◽

Inductively Coupled

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