Numerical Study of the Effects of Frequency in Inductively Coupled Plasma Using Particle-in-Cell/Monte Carlo Simulation

Jin-Sung Oh; Toshiaki Makabe

doi:10.1143/jjap.39.1358

Numerical Study of the Effects of Frequency in Inductively Coupled Plasma Using Particle-in-Cell/Monte Carlo Simulation

Japanese Journal of Applied Physics ◽

10.1143/jjap.39.1358 ◽

2000 ◽

Vol 39 (Part 1, No. 3A) ◽

pp. 1358-1364 ◽

Cited By ~ 3

Author(s):

Jin-Sung Oh ◽

Toshiaki Makabe

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Inductively Coupled Plasma ◽

Numerical Study ◽

Particle In Cell ◽

Inductively Coupled

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A Numerical Study of a Collision-Dominated Inductively Coupled Plasma Using Particle-in-Cell/Monte Carlo Simulation

Japanese Journal of Applied Physics ◽

10.1143/jjap.38.4423 ◽

1999 ◽

Vol 38 (Part 1, No. 7B) ◽

pp. 4423-4428

Author(s):

Jin-Sung Oh ◽

Toshiaki Makabe

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Inductively Coupled Plasma ◽

Numerical Study ◽

Particle In Cell ◽

Inductively Coupled

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Two-dimensional particle-in-cell Monte Carlo simulation of a miniature inductively coupled plasma source

Journal of Applied Physics ◽

10.1063/1.3506536 ◽

2010 ◽

Vol 108 (9) ◽

pp. 093309 ◽

Cited By ~ 22

Author(s):

Yoshinori Takao ◽

Naoki Kusaba ◽

Koji Eriguchi ◽

Kouichi Ono

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Inductively Coupled Plasma ◽

Plasma Source ◽

Two Dimensional ◽

Particle In Cell ◽

Inductively Coupled

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Particle-In-Cell/Monte-Carlo Simulation of Plasma and Neutral Gas Flow for the Inner Coating of PET Bottles by Plasma-Based Ion Implantation. N2 Gas Plasma

Plasma Processes and Polymers ◽

10.1002/ppap.200500008 ◽

2005 ◽

Vol 2 (6) ◽

pp. 480-484 ◽

Cited By ~ 5

Author(s):

Yoshiko Miyagawa ◽

Masaaki Tanaka ◽

Hiroshi Nakadate ◽

Masami Ikeyama ◽

Soji Miyagawa

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Ion Implantation ◽

Gas Flow ◽

Particle In Cell ◽

Pet Bottles ◽

Neutral Gas ◽

Gas Plasma

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Particle-in-cell/Monte Carlo simulation of electron and ion currents to cylindrical Langmuir probe

Contributions to Plasma Physics ◽

10.1002/ctpp.201800063 ◽

2018 ◽

Vol 59 (3) ◽

pp. 314-325 ◽

Cited By ~ 1

Author(s):

Petr Zikán ◽

Kristián Farkaš ◽

David Trunec ◽

Jaroslav Jánský ◽

Zdeněk Bonaventura

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Langmuir Probe ◽

Ion Currents ◽

Particle In Cell ◽

Cylindrical Langmuir Probe

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Study of scaling law for particle-in-cell/Monte Carlo simulation of low-temperature magnetized plasma for electric propulsion

Journal of Physics D Applied Physics ◽

10.1088/1361-6463/ab394b ◽

2019 ◽

Vol 52 (45) ◽

pp. 455203 ◽

Cited By ~ 1

Author(s):

Jian Li ◽

Jianjun Wu ◽

Yu Zhang ◽

Sheng Tan ◽

Yang Ou

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Low Temperature ◽

Electric Propulsion ◽

Scaling Law ◽

Magnetized Plasma ◽

Particle In Cell

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A particle-in-cell Monte Carlo simulation of an rf discharge in methane: frequency and pressure features of the ion energy distribution function

Plasma Sources Science and Technology ◽

10.1088/0963-0252/15/3/015 ◽

2006 ◽

Vol 15 (3) ◽

pp. 402-409 ◽

Cited By ~ 10

Author(s):

O V Proshina ◽

T V Rakhimova ◽

A T Rakhimov

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Distribution Function ◽

Energy Distribution ◽

Energy Distribution Function ◽

Rf Discharge ◽

Ion Energy ◽

Ion Energy Distribution ◽

Particle In Cell

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Numerical study of plasma-fluid characteristics and thrust performance of a low-power argon inductively coupled plasma electrothermal thruster

Journal of Applied Physics ◽

10.1063/5.0022018 ◽

2020 ◽

Vol 128 (17) ◽

pp. 173302

Author(s):

T. Fujino ◽

M. Yamauchi

Keyword(s):

Low Power ◽

Inductively Coupled Plasma ◽

Numerical Study ◽

Inductively Coupled ◽

Thrust Performance ◽

Fluid Characteristics

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A particle-in-cell/Monte Carlo simulation of a capacitively coupled chlorine discharge

2014 IEEE 41st International Conference on Plasma Sciences (ICOPS) held with 2014 IEEE International Conference on High-Power Particle Beams (BEAMS) ◽

10.1109/plasma.2014.7012492 ◽

2014 ◽

Author(s):

Shuo Huang ◽

J. T. Gudmundsson

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Capacitively Coupled ◽

Particle In Cell

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Particle-in-Cell with Monte Carlo Simulation of SPT-100 Exhaust Plumes

Journal of Spacecraft and Rockets ◽

10.2514/2.3840 ◽

2002 ◽

Vol 39 (3) ◽

pp. 409-419 ◽

Cited By ~ 23

Author(s):

Francesco Taccogna ◽

Savino Longo ◽

Mario Capitelli

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Particle In Cell ◽

Exhaust Plumes

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Modeling of the plasma extraction efficiency of an inductively coupled plasma-mass spectrometer interface using the direct simulation Monte Carlo method

Spectrochimica Acta Part B Atomic Spectroscopy ◽

10.1016/j.sab.2013.12.010 ◽

2014 ◽

Vol 93 ◽

pp. 34-40 ◽

Cited By ~ 7

Author(s):

Niko Kivel ◽

Heiko-Dirk Potthast ◽

Ines Günther-Leopold ◽

Frank Vanhaecke ◽

Detlef Günther

Keyword(s):

Monte Carlo ◽

Monte Carlo Method ◽

Mass Spectrometer ◽

Inductively Coupled Plasma ◽

Extraction Efficiency ◽

Direct Simulation Monte Carlo ◽

Direct Simulation ◽

Inductively Coupled ◽

Simulation Monte Carlo ◽

Plasma Extraction

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