Particle-in-cell and Monte Carlo simulation of the hydrogen plasma immersion ion implantation process

1999 ◽  
Vol 86 (4) ◽  
pp. 1817-1821 ◽  
Author(s):  
Dixon Tat-Kun Kwok ◽  
Paul K. Chu ◽  
Blake P. Wood ◽  
Chung Chan
Keyword(s):  
Monte Carlo Simulation ◽  
Monte Carlo ◽  
Ion Implantation ◽  
Hydrogen Plasma ◽  
Particle In Cell ◽  
Implantation Process ◽  
Plasma Immersion Ion Implantation

Particle-in-cell/Monte Carlo simulation of electron and ion currents to cylindrical Langmuir probe

2018 ◽  
Vol 59 (3) ◽  
pp. 314-325 ◽  
Author(s):  
Petr Zikán ◽  
Kristián Farkaš ◽  
David Trunec ◽  
Jaroslav Jánský ◽  
Zdeněk Bonaventura
Keyword(s):  
Monte Carlo Simulation ◽  
Monte Carlo ◽  
Langmuir Probe ◽  
Ion Currents ◽  
Particle In Cell ◽  
Cylindrical Langmuir Probe

Particle-in-cell numerical simulation of non-uniform plasma immersion ion implantation

2007 ◽  
Vol 201 (9-11) ◽  
pp. 5458-5462 ◽  
Author(s):  
Y.X. Huang ◽  
X.B. Tian ◽  
S.Q. Yang ◽  
Ricky K.Y. Fu ◽  
Paul K. Chu
Keyword(s):  
Numerical Simulation ◽  
Ion Implantation ◽  
Particle In Cell ◽  
Plasma Immersion Ion Implantation ◽  
Uniform Plasma
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