Control the Composition of Tantalum Oxynitride Films by Sputtering a Tantalum Target in Ar/O2 /N2 Radiofrequency Magnetron Plasmas

2013 ◽  
Vol 10 (11) ◽  
pp. 990-998 ◽  
Author(s):  
Angélique Bousquet ◽  
Fadi Zoubian ◽  
Joël Cellier ◽  
Thierry Sauvage ◽  
Eric Tomasella
Keyword(s):  
2013 ◽  
Vol 39 (1) ◽  
pp. 139 ◽  
Author(s):  
Xiaohui Li ◽  
Xin Yu ◽  
Rongwei Fan ◽  
Yang Yu ◽  
Chang Liu ◽  
...  

1982 ◽  
Vol 80 (3) ◽  
pp. 452-455
Author(s):  
R. G. Alsmiller ◽  
J. Barish ◽  
J. M. Barnes ◽  
R. T. Santoro

2012 ◽  
Vol 534 ◽  
pp. 197-200
Author(s):  
Bo Zhang

InSnTaO films were deposited on glass substrates by magnetron sputtering with ITO target and tantalum target. X-ray diffractometer (XRD) and atomic force microscopy (AFM) revealed that InSnTaO films had better crystalline structure, larger grain size and lower surface roughness than ITO films. Ta-doping remarkably improved the optical-electrical characteristics. The films showed obvious Burstin-Moss effect with substrate temperature. Moreover, the direct transition model showed wider optical band gap of InSnTaO films than that of ITO films. As a result, InSnTaO films prepared by co-sputtering revealed better comprehensive properties than traditional ITO films.


Author(s):  
Е. Лыкова ◽  
E. Lykova ◽  
М. Желтоножская ◽  
M. Zheltonozhskaya ◽  
Ф. Смирнов ◽  
...  

Purpose: To estimate the contribution of the secondary neutron flux to the total radiation flux during the operation of Trilogy linear medical accelerator and Varian’s Clinac 2100 accelerator for assessment of impact on the health of patients and medical personnel. High-energy linear accelerators operating at energies higher than 8 MeV generate neutron fluxes when interacting with accelerator elements and with structural materials of the room for treating patients. Neutrons can form at the accelerator head (target, collimators, smoothing filter, etc.), the procedure room, and directly in the patient’s body. Because of the high radiobiological hazard of neutron radiation, its contribution to the total beam flux, even at a level of few percent, substantially increases the dose received by the patient. Material and methods: Secondary neutron fluxes were investigated during the process of the linear medical accelerators Trilogy and Clinac 2100 of Varian operation by the photoactivation method using (γ, n) and (n, γ) reactions on the detection target of natural 181Ta. In addition, measurements of neutron spectra were carried out directly in the room during the operation of a medical accelerator using a spectrometer-dosimeter SDMF-1608. Results: It was determined that the neutron flux on the tantalum target is 16 % of the gamma-ray flux on the same target when the accelerator is operated with a 18 MeV bremsstrahlung energy and 5 % when the accelerator is operated with a 20 MeV excluding thermal neutrons. Conclusion: Finally, it may be noted that, taking into account the coefficient of relative biological efficiency (RBE) of neutron radiation for neutrons with energies of 0.1–200 keV equal to 10 compared with the RBE coefficient for gamma quanta (equal to 1), even preliminary analysis demonstrates significant underestimation of the contribution of neutrons dose to the total dose received by the patient in radiation therapy using bremsstrahlung of 18 and 20 MeV.


2012 ◽  
Vol 23 (6) ◽  
pp. 1591-1595 ◽  
Author(s):  
Kadir Gunoglu ◽  
Nilgun Demir ◽  
Iskender Akkurt ◽  
Zehra Nur Demirci

2000 ◽  
Vol 88 (7) ◽  
Author(s):  
K. Banerjee ◽  
S. Lahiri ◽  
A. Ramaswamy ◽  
S.B. Manohar ◽  
N. R. Das

Heavy ion irradiation on tantalum metal target with 57 MeV


Author(s):  
Claudio Torregrosa Martin ◽  
Marco Calviani ◽  
Antonio Perillo-Marcone ◽  
Romain Ferriere ◽  
Nicola Solieri ◽  
...  

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