Hysteresis effect during reactive sputtering

In this work, we studied the effect of constant parameters of the sputtering system on the width of the hysteresis loop during reactive sputtering. The sticking coefficient of the reactive gas to the surface, the chamber pumping speed, the target area, etc. are taken as parameters. The comparative study was carried out by numerical solution of systems of algebraic equations describing the chemisorption and physicochemical models of metal target reactive sputtering in a single reactive gas. The calculations were performed for sputtering a tantalum target in an Ar + O2 mixture. The studied dependences were non-linear in all cases.

Probe investigating of laser plasma when intensity of radiation on the target near 109 W/cm2

The appearance of third charged particles groups has been fixed when the laser radiation interacted with metal target in rarefied environ gas. The intensity of opti-cal range laser radiation was ~109 W/cm2. The opportunity of using Langmuir probe for diagnosing plasma processes with nanosecond resolution has been demonstrated. The results of electron temperature measurements have agreed with results of estimate model calculations for the two fasted groups of particles in the absorbtion area (for experimental conditionals).

Some results of probe method application for laser plasma investigating with intensity of radiation on the target  109 W/cm2

The appearance of third charged particles groups has fixed, when the laser radiation interact-ed with metal target in rarefied environ gas. The intensity of optical range laser radiation was  109 W/cm2. The opportunity of using Langmuir probe for diagnosing plasma processes with nanosecond resolution has demonstrated

Comparison of Influence of the Fast Atom Beam and Ion Beam on the Metal Target

A comparative analysis of a fast atom beam and ion beam effect on a metal target in the binary collision model is performed. Irradiation by fast atoms has been shown to more closely correspond to neutron radiation in a nuclear reactor, in terms of the primary knocked-on atom spectrum and the efficiency and mechanism of the radiation defect formation. It was found that upon irradiation by fast carbon atoms with an energy of 0.2-0.3 MeV, the average number of radiation defects in the displacement cascade of one atom is four to five times higher than the calculated values using the SRIM program for ions with the same energy. It is shown that during penetration in the target, the probability of ionization of atoms with energies less than 0.4 MeV is negligible.