Modulation of uniform magnetic field on electron dynamics in low‐pressure capacitively coupled plasmas

Plasma Processes and Polymers ◽

10.1002/ppap.202100072 ◽

2021 ◽

Author(s):

Yu‐Qing Guo ◽

Jing‐Yu Sun ◽

Quan‐Zhi Zhang ◽

Fang‐Fang Ma ◽

Xiang‐Mei Liu ◽

...

Keyword(s):

Magnetic Field ◽

Uniform Magnetic Field ◽

Low Pressure ◽

Electron Dynamics ◽

Capacitively Coupled ◽

Coupled Plasmas

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Intrasheath electron dynamics in low pressure capacitively coupled plasmas

Plasma Sources Science and Technology ◽

10.1088/1361-6595/abe728 ◽

2021 ◽

Author(s):

Mate Vass ◽

Aranka Derzsi ◽

Julian Schulze ◽

Zoltan Donko

Keyword(s):

Low Pressure ◽

Electron Dynamics ◽

Capacitively Coupled ◽

Coupled Plasmas

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An overview of diagnostic methods of low-pressure capacitively coupled plasmas

Thin Solid Films ◽

10.1016/j.tsf.2012.02.016 ◽

2012 ◽

Vol 521 ◽

pp. 141-145 ◽

Author(s):

Yong-Xin Liu ◽

Wei Jiang ◽

Xiao-Song Li ◽

Wen-Qi Lu ◽

You-Nian Wang

Keyword(s):

Low Pressure ◽

Diagnostic Methods ◽

Capacitively Coupled ◽

Coupled Plasmas

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Effects of magnetic field on the secondary electron asymmetry effect in capacitively coupled plasmas

Physics of Plasmas ◽

10.1063/5.0068101 ◽

2021 ◽

Vol 28 (12) ◽

pp. 123505

Author(s):

Shali Yang ◽

Tianxiang Zhang ◽

Hanlei Lin ◽

Hao Wu ◽

Qiang Zhang

Keyword(s):

Magnetic Field ◽

Secondary Electron ◽

Asymmetry Effect ◽

Capacitively Coupled ◽

Coupled Plasmas

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Influence of inhomogeneous magnetic field on the characteristics of very high frequency capacitively coupled plasmas

Journal of Applied Physics ◽

10.1063/1.3296349 ◽

2010 ◽

Vol 107 (5) ◽

pp. 053302 ◽

Author(s):

Kallol Bera ◽

Shahid Rauf ◽

Jason Kenney ◽

Leonid Dorf ◽

Ken Collins

Keyword(s):

Magnetic Field ◽

High Frequency ◽

Inhomogeneous Magnetic Field ◽

Very High Frequency ◽

Capacitively Coupled ◽

Coupled Plasmas ◽

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Simulation of Low-Pressure Capacitively Coupled Plasmas Combining a Parallelized Particle-in-Cell Simulation and Direct Simulation of Monte Carlo

IEEE Transactions on Plasma Science ◽

10.1109/tps.2014.2368145 ◽

2014 ◽

Vol 42 (12) ◽

pp. 3819-3824 ◽

Author(s):

Jin Seok Kim ◽

Min Young Hur ◽

In Cheol Song ◽

Ho-Jun Lee ◽

Hae June Lee

Keyword(s):

Monte Carlo ◽

Low Pressure ◽

Direct Simulation ◽

Capacitively Coupled ◽

Particle In Cell ◽

Cell Simulation ◽

Coupled Plasmas

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Phase dependence of relativistic electron dynamics and emission spectra in the superposition of a ultraintense laser field and a strong uniform magnetic field

X-Ray Lasers 2004 ◽

10.1201/9781482269208-59 ◽

2005 ◽

pp. 291-294

Keyword(s):

Magnetic Field ◽

Relativistic Electron ◽

Laser Field ◽

Uniform Magnetic Field ◽

Emission Spectra ◽

Electron Dynamics ◽

Phase Dependence

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Relativistic free-electron dynamics and light-emission spectra in the simultaneous presence of a superintense laser field and a strong uniform magnetic field

Physical Review A ◽

10.1103/physreva.58.3221 ◽

1998 ◽

Vol 58 (4) ◽

pp. 3221-3234 ◽

Author(s):

Yousef I. Salamin ◽

Farhad H. M. Faisal

Keyword(s):

Magnetic Field ◽

Free Electron ◽

Laser Field ◽

Uniform Magnetic Field ◽

Light Emission ◽

Emission Spectra ◽

Electron Dynamics ◽

Simultaneous Presence

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Simulation of low-pressure capacitively coupled plasmas using a parallelized particle-in-cell simulation and a direct simulation of Monte Carlo for neutrals

2013 Abstracts IEEE International Conference on Plasma Science (ICOPS) ◽

10.1109/plasma.2013.6633183 ◽

2013 ◽

Author(s):

Jin Seok Kim ◽

In Cheol Song ◽

Ho-Jun Lee ◽

Hae June Lee

Keyword(s):

Monte Carlo ◽

Low Pressure ◽

Direct Simulation ◽

Capacitively Coupled ◽

Particle In Cell ◽

Cell Simulation ◽

Coupled Plasmas

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Kinetic effects in low pressure capacitively coupled plasmas

2012 Abstracts IEEE International Conference on Plasma Science ◽

10.1109/plasma.2012.6383882 ◽

2012 ◽

Author(s):

P. H. Stoltz ◽

A. Likhanskii ◽

P. Neilson

Keyword(s):

Low Pressure ◽

Capacitively Coupled ◽

Kinetic Effects ◽

Coupled Plasmas

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Charged particle dynamics and distribution functions in low pressure dual-frequency capacitively coupled plasmas operated at low frequencies and high voltages

Plasma Sources Science and Technology ◽

10.1088/1361-6595/ab9374 ◽

2020 ◽

Vol 29 (7) ◽

pp. 075014 ◽

Author(s):

P Hartmann ◽

L Wang ◽

K Nösges ◽

B Berger ◽

S Wilczek ◽

...

Keyword(s):

Charged Particle ◽

Low Pressure ◽

Particle Dynamics ◽

Distribution Functions ◽

Dual Frequency ◽

Low Frequencies ◽

Capacitively Coupled ◽

Coupled Plasmas

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