Effect of deposition temperature on the microstructure and dielectric properties of Ba0.6 Sr0.4 TiO3 thin film deposited by radio-frequency magnetron sputtering

2009 ◽  
Vol 206 (7) ◽  
pp. 1510-1514 ◽  
Author(s):  
Zuyong Feng ◽  
Wei Chen ◽  
Ooi Kiang Tan
Keyword(s):  
Thin Film ◽  
Dielectric Properties ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Deposition Temperature ◽  
Radio Frequency Magnetron ◽  
Tio3 Thin Film ◽  
Radio Frequency Magnetron Sputtering

Fabrication and characterizations of ZnO thin film transistors prepared by using radio frequency magnetron sputtering

2008 ◽  
Vol 52 (5) ◽  
pp. 813-816 ◽  
Author(s):  
R. Navamathavan ◽  
Chi Kyu Choi ◽  
Eun-Jeong Yang ◽  
Jae-Hong Lim ◽  
Dae-Kue Hwang ◽  
...  
Keyword(s):  
Thin Film ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Thin Film Transistors ◽  
Radio Frequency Magnetron ◽  
Zno Thin Film ◽  
Radio Frequency Magnetron Sputtering

ZnO thin film synthesis by reactive radio frequency magnetron sputtering

2014 ◽  
Vol 318 ◽  
pp. 2-5 ◽  
Author(s):  
Volkan Şenay ◽  
Suat Pat ◽  
Şadan Korkmaz ◽  
Tuna Aydoğmuş ◽  
Saliha Elmas ◽  
...  
Keyword(s):  
Thin Film ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Zno Thin Film ◽  
Radio Frequency Magnetron Sputtering ◽  
Film Synthesis
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