Fabrication and Characterization of Sensitive Room Temperature NO 2 Gas Sensor Based on ZnSnO 3 Thin Film

2019 ◽  
Vol 216 (16) ◽  
pp. 1900205 ◽  
Author(s):  
Samar Dabbabi ◽  
Tarek Ben Nasr ◽  
Ali Madouri ◽  
Antonella Cavanna ◽  
Antonio Garcia‐Loureiro ◽  
...  
Keyword(s):  
Thin Film ◽  
Gas Sensor ◽  
Room Temperature ◽  
Fabrication And Characterization

Fabrication and characterization of polyaniline-based gas sensor by ultra-thin film technology

2002 ◽  
Vol 81 (2-3) ◽  
pp. 158-164 ◽  
Author(s):  
Dan Xie ◽  
Yadong Jiang ◽  
Wei Pan ◽  
Dan Li ◽  
Zhiming Wu ◽  
...  
Keyword(s):  
Thin Film ◽  
Gas Sensor ◽  
Thin Film Technology ◽  
Fabrication And Characterization ◽  
Ultra Thin Film

Modeling, Fabrication and Characterization of Piezoelectric ZnO-Based Micro-Sensors and Micro-Actuators

2013 ◽  
Vol 444-445 ◽  
pp. 1636-1643 ◽  
Author(s):  
Yan Hui Yuan ◽  
He Jun Du ◽  
Xin Xia ◽  
Yoke Rung Wong
Keyword(s):  
Thin Film ◽  
Room Temperature ◽  
Laser Doppler Vibrometer ◽  
Zno Thin Film ◽  
Design Specifications ◽  
Piezoelectric Cantilever ◽  
Fabrication And Characterization ◽  
Micro Cantilever ◽  
Microfabrication Techniques

In this study, capabilities of zinc oxide (ZnO) thin films in sensing and actuating were investigated using micromachined micro-cantilevers. A heterogeneous piezoelectric cantilever was modeled to study its response under voltage and/or external mechanical loading. A ZnO thin-film micro-cantilever was designed based on the developed theoretical model. Simulated tip deflections of the micro-cantilever were on the nanometer level under typical electrical and mechanical input. A prototype was fabricated with microfabrication techniques. The ZnO thin film was sputtered at room temperature and demonstrated good compatibility with common chemicals and processes in micromachining. The fabricated micro-cantilever was experimentally characterized for its actuating and sensing performance. For actuator characterization tip deflection of the micro-cantilever was detected by a laser Doppler vibrometer, while for sensor characterization the micro-cantilever was calibrated as an acceleration sensor using a reference accelerometer. The experimental resonant frequency, actuating and sensing sensitivities agreed well the design specifications.

High Cooling Power Density of SiGe/Si Superlattice Microcoolers

2001 ◽  
Vol 691 ◽  
Author(s):  
Gehong Zeng ◽  
Xiaofeng Fan ◽  
Chris LaBounty ◽  
John E. Bowers ◽  
Edward Croke ◽  
...  
Keyword(s):  
Thin Film ◽  
Power Density ◽  
Room Temperature ◽  
Density Measurement ◽  
Thermionic Emission ◽  
Cooling Power ◽  
Thin Film Resistors ◽  
Fabrication And Characterization ◽  
Superlattice Structures

ABSTRACTFabrication and characterization of SiGe/Si superlattice microcoolers integrated with thin film resistors are described. Superlattice structures were used to enhance the device performance by reducing the thermal conductivity, and by providing selective emission of hot carriers through thermionic emission. Thin film metal resistors were integrated on top of the cooler devices and they were used as heat load for cooling power density measurement. Various device sizes were characterized. Net cooling over 4.1 K and a cooling power density of 598 W/cm2 for 40 × 40 μm2 devices were measured at room temperature.

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