Optimized selective‐area p‐type diffusion for the back‐illuminated planar InGaAs/InP avalanche photodiodes by a single diffusion process

Author(s):  
Yiren Chen ◽  
Zhiwei Zhang ◽  
Guoqing Miao ◽  
Hong Jiang ◽  
Hang Song
1989 ◽  
Vol 161 ◽  
Author(s):  
D.L. Dreifus ◽  
Y. Lansari ◽  
J.W. Han ◽  
S. Hwang ◽  
J.W. Cook ◽  
...  

ABSTRACTII-VI semiconductor surface passivants, insulators, and epitaxial films have been deposited onto selective surface areas by employing a new masking and lift-off technique. The II-VI layers were grown by either conventional or photoassisted molecular beam epitaxy (MBE). CdTe has been selectively deposited onto HgCdTe epitaxial layers as a surface passivant. Selective-area deposition of ZnS has been used in metal-insulator-semiconductor (MIS) structures. Low resistance ohmic contacts to p-type CdTe:As have also been realized through the use of selectively-placed thin films of the semi-metal HgTe followed by a thermal evaporation of In. Epitaxial layers of HgTe, HgCdTe, and HgTe-CdTe superlattices have also been grown in selective areas on CdZnTe substrates, exhibiting specular morphologies and double-crystal x-ray diffraction rocking curves (DCXD) with full widths at half maximum (FWHMs) as narrow as 140 arcseconds.


2012 ◽  
Vol 101 (9) ◽  
pp. 093506 ◽  
Author(s):  
A. V. Sampath ◽  
Q. G. Zhou ◽  
R. W. Enck ◽  
D. McIntosh ◽  
H. Shen ◽  
...  

2005 ◽  
Vol 44 (No. 17) ◽  
pp. L508-L510 ◽  
Author(s):  
Tomoki Abe ◽  
Koshi Ando ◽  
Katsushi Ikumi ◽  
Hiroyasu Maeta ◽  
Junji Naruse ◽  
...  

2007 ◽  
Vol 556-557 ◽  
pp. 339-342 ◽  
Author(s):  
W.S. Loh ◽  
C. Mark Johnson ◽  
J.S. Ng ◽  
Peter M. Sandvik ◽  
Steve Arthur ◽  
...  

Hole initiated avalanche multiplication characteristics of 4H-SiC avalanche photodiodes have been studied. The diodes had n+-n-p SiC epitaxial layers grown on a p-type substrate. These 1 mm2 devices had very low dark currents and exhibited sharp breakdown at voltages of approximately 500V. The diodes multiplication characteristics appeared to be identical when the wavelength of the illuminating light from the top varied from 288 to 325nm, implying that almost pure hole initiated multiplication was occurring. The multiplication factor data were modelled using a local multiplication model with impact ionization coefficients of 4H-SiC reported by various authors. The impact ionization coefficients extracted from submicron devices by Ng et al. were found to give accurate predictions for multiplication factors within the uncertainties of the doping levels. This result suggests that their ionization coefficients can be applied to thicker bulk 4H-SiC structures.


2015 ◽  
Vol 27 (3) ◽  
pp. 272-275 ◽  
Author(s):  
Ke Xiu Dong ◽  
Jun Wang ◽  
Yan Yi Zhang ◽  
Xue Cai Cheng ◽  
Mei Ying Ou

2002 ◽  
Vol 33 (8) ◽  
pp. 675-680 ◽  
Author(s):  
Young-Don Ko ◽  
Yong Hwan Kwon ◽  
Kyung Sook Hyun ◽  
Changhyun Yi ◽  
Ilgu Yun

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