In-situ Electron Microscopy Studies of Hot Filament Chemical Vapour Deposition Diamond Thin Film Growth in an Environmental SEM

1996 ◽  
Vol 154 (1) ◽  
pp. 43-54 ◽  
Author(s):  
E. Charyshkin ◽  
N. N. Kinaev ◽  
M. Waterworth ◽  
D. R. Cousens ◽  
N. Calos ◽  
...  
2006 ◽  
Vol 956 ◽  
Author(s):  
Paul William May ◽  
Matthew Hannaway

ABSTRACTUltrananocrystalline diamond (UNCD) films have been deposited using hot filament chemical vapour deposition using Ar/CH4/H2 gas mixtures plus additions of B2H6 in an attempt to make p-type semiconducting films. With increasing additions of B2H6 from 0 to 40,000 ppm with respect to C, the film growth rate was found to decrease substantially, whilst the individual grain sizes increased from nm to μm. With 40,000 ppm of B2H6, crystals of boric oxide were found on the substrate surface, which slowly hydrolysed to boric acid on exposure to air. These results are rationalised using a model for UNCD growth based on competition for surface radical sites between CH3 and C atoms.


1993 ◽  
Vol 228 (1-2) ◽  
pp. 125-128 ◽  
Author(s):  
G.J. Leusink ◽  
T.G.M. Oosterlaken ◽  
G.C.A.M. Janssen ◽  
S. Redelaar

Author(s):  
K. Yagi ◽  
K. Takayanagi ◽  
K. Kobayashi ◽  
G. Honjo

An ultra-high vacuum (UHV) electron microscope was constructed for special purpose of in-situ studies of thin film growth and some experimental results have already been published (1). Here, recent results are described.1. Au/graphite (nucleation and growth mode). Growths of Au in a dendritic shape at 150°C were observed on graphite. The dendritic morphology was said to be characteristic of the Au growth on UHV cleaved graphite (2). We cleaned an air cleaved surface by heating in UHV EM (10-8 torr) for 20 minutes prior to the Au deposition. The dendritic shape growth in Fig. 1, therefore, indicates that the graphite surface became clean with the present heat treatment and that the in-situ studies were done under clean conditions.


Growth of diamond at conditions where it is the metastable phase can be achieved by various chemical vapour deposition methods. Atomic hydrogen plays a major role in mediating rates and in maintaining a proper surface for growth. Low molecular weight hydrocarbon species (e.g. CH 3 and C 2 H x are believed to be responsible for extension of the diamond lattice, but complete understanding of attachment mechanisms has not yet been achieved. The nucleation of diamond crystals directly from the gas phase can proceed through a graphitic intermediate. Once formed, the growth rate of diamond crystals is enhanced by the influence of stacking errors. Many of the commonly observed morphologies, e.g. hexagonal platelets and (apparent) decahedral and icosahedral crystals, can be explained by the influence of simple stacking errors on growth rates. In situ measurements of growth rates as a function of hydrocarbon concentration show that the mechanism for diamond growth is complex and may involve surface adsorption processes in rate limiting steps. The transport régime in diamond deposition reactors varies widely. In the hot-filament and microwave reactors, which operate from 20 to 100 Torr (1 Torr ≈ 133 Pa), the transport of mass and energy is dominated by molecular diffusion. In the atmospheric pressure combustion and plasma methods, transport is dominated by convection. In situ measurements of H atom recombination rates in hot-filament reactors show that, under many commonly used process conditions, transport of atomic hydrogen to the growing surface is diffusion limited and H atom recombination is a major contributor to energy transport.


2012 ◽  
Vol 1511 ◽  
Author(s):  
M. Zamir Othman ◽  
Paul W. May ◽  
Neil A. Fox

ABSTRACTExperiments were performed to incorporate Li and N simultaneously into the diamond lattice during hot-filament chemical vapour deposition in an attempt to produce n-type semiconducting diamond with useful electronic characteristics. Microcrystalline diamond films were grown using a mixture of methane/ammonia/hydrogen gases with tantalum as the filament. The Li was added by placing crystals of lithium nitride (Li3N) on the substrate and allowing them to melt and then slowly diffuse into the film. SIMS depth profiles showed that this process produced high levels of Li and N (0.05% - 0.5%) situated in the same region within the diamond film. The crystallinity and morphology of diamond crystals produced were confirmed using laser Raman spectrometry and scanning electron microscopy.


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