Nitrogen Incorporation into Hard Amorphous Carbon Films Obtained by RF Plasma Decomposition of CH4-N2 Gas Mixtures
1995 ◽
Vol 192
(2)
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pp. 493-502
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Keyword(s):
2000 ◽
Vol 18
(5)
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pp. 2230
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2002 ◽
Vol 16
(06n07)
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pp. 1096-1100
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Keyword(s):
2001 ◽
Vol 10
(3-7)
◽
pp. 1002-1006
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Keyword(s):
2002 ◽
Vol 5
(2-3)
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pp. 271-277
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Keyword(s):
2010 ◽
Vol 205
(7)
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pp. 2126-2133
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2001 ◽
Vol 10
(2)
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pp. 200-206
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2005 ◽
Vol 14
(3-7)
◽
pp. 970-974
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Keyword(s):
2008 ◽
Vol 17
(6)
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pp. 925-930
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Keyword(s):
1992 ◽
Vol 1
(5-6)
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pp. 538-542
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