Optical and structural properties of nitrogen doped amorphous carbon films grown by rf plasma-enhanced CVD

2001 ◽  
Vol 10 (3-7) ◽  
pp. 1002-1006 ◽  
Author(s):  
Y. Hayashi ◽  
K.M. Krishna ◽  
H. Ebisu ◽  
T. Soga ◽  
M. Umeno ◽  
...  
2020 ◽  
Vol 860 ◽  
pp. 190-195
Author(s):  
Irma Septi Ardiani ◽  
Khoirotun Nadiyyah ◽  
Anna Zakiyatul Laila ◽  
Sarayut Tunmee ◽  
Hideki Nakajima ◽  
...  

Amorphous carbon films have been explored and used in a wide variety of applications. With the n-type and p-type amorphous carbon film, it can be used to make p-n junctions for solar cells. This research aims to study the structure of boron- and nitrogen-doped amorphous carbon (a-C:B and a-C:N) films. This research uses the basic material of bio-product from palmyra sugar to form amorphous carbon. Amorphous carbon was synthesized by heating the palmyra sugar at 250°C. The results of XRD showed that the doped films produce an amorphous carbon phase. PES was used to analyze the bonding state of dopants in the sample. B4C, BC3, and BC2O bonds formed in a-C:B, while pyridine and pyrrolic formed in a-C:N.


2002 ◽  
Vol 16 (06n07) ◽  
pp. 1096-1100 ◽  
Author(s):  
Y. HAYASHI ◽  
S. ISHIKAWA ◽  
T. SOGA ◽  
T. JIMBO ◽  
M. ADACHI ◽  
...  

We report on the efficient photoluminescence (PL) and optical properties of hydrogenated amorphous carbon thin films codoped with nitrogen and trimethylboron (TMB) grown by rf plasma-enhanced chemical vapor deposition at room temperature. The study clearly shows the observation of discrete PL emission peaks. The PL intensity of the film deposited with 20 sccm TMB is more than 103 times than that of the film deposited without TMB. The change of optical bandgap and PL emission energy with TMB flow rate are discussed based on sp3 and sp2 C networks. Angular dependence of the PL spectra revealed that the origin of multiple sharp peaks is due to Fabry-Perot cavity interference effect.


2000 ◽  
Vol 87 (1) ◽  
pp. 621-623 ◽  
Author(s):  
X. Wang ◽  
H. R. Harris ◽  
K. Bouldin ◽  
H. Temkin ◽  
S. Gangopadhyay ◽  
...  

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