Effect of nitrogen mole fraction on hydrogenated amorphous silicon nitride deposited by DC magnetron sputtering: transition between metallic and reactive sputtering

Reactive Sputtering ◽

Dc Magnetron Sputtering ◽

Hydrogenated amorphous silicon nitride deposited by DC magnetron sputtering

Superlattices and Microstructures ◽

10.1016/j.spmi.2006.07.003 ◽

2006 ◽

Vol 40 (4-6) ◽

pp. 598-602 ◽

Cited By ~ 8

Author(s):

K. Mokeddem ◽

M. Aoucher ◽

T. Smail

Keyword(s):

Silicon Nitride ◽

Magnetron Sputtering ◽

Amorphous Silicon ◽

Dc Magnetron Sputtering ◽

Study of hydrogenated amorphous silicon nitride films prepared by RF magnetron sputtering

Applied Physics A Solids and Surface ◽

10.1007/bf00324776 ◽

1991 ◽

Vol 52 (5) ◽

pp. 339-343 ◽

Cited By ~ 2

Author(s):

A. K. Bandyopadhyay ◽

T. K. Bhattacharyya ◽

Ratnabali Banerjee ◽

A. K. Batabyal ◽

A. K. Barua

Keyword(s):

Silicon Nitride ◽

Magnetron Sputtering ◽

Amorphous Silicon ◽

Rf Magnetron Sputtering ◽

Silicon Nitride Films ◽

Metastable defects in hydrogenated amorphous silicon nitride

10.31979/etd.455y-6kvb ◽

1992 ◽

Author(s):

Elaheh Sigari

Keyword(s):

Silicon Nitride ◽

Amorphous Silicon ◽

Thermal annealing of light−induced metastable defects in hydrogenated amorphous silicon nitride

Applied Physics Letters ◽

10.1063/1.106230 ◽

1991 ◽

Vol 59 (14) ◽

pp. 1723-1725 ◽

Cited By ~ 44

Author(s):

E. D. Tober ◽

J. Kanicki ◽

M. S. Crowder

Keyword(s):

Silicon Nitride ◽

Amorphous Silicon ◽

Thermal Annealing ◽

Nitrogen bonding environments and local order in hydrogenated amorphous silicon nitride films studied by Raman spectroscopy

Journal of Applied Physics ◽

10.1063/1.370604 ◽

1999 ◽

Vol 85 (11) ◽

pp. 7899-7904 ◽

Cited By ~ 31

Author(s):

J. Bandet ◽

B. Despax ◽

M. Caumont

Keyword(s):

Raman Spectroscopy ◽

Silicon Nitride ◽

Amorphous Silicon ◽

Local Order ◽

Silicon Nitride Films ◽

Hydrogenated amorphous-silicon-nitride-based photonic light-emitting devices

10.1117/12.382796 ◽

2000 ◽

Author(s):

Ali Serpenguzel

Keyword(s):

Silicon Nitride ◽

Amorphous Silicon ◽

Light Emitting ◽

Light Emitting Devices ◽

Hydrogenated amorphous silicon nitride (a-SiNx:H) as surface passivation layer

Surface Passivation of Industrial Crystalline Silicon Solar Cells ◽

10.1049/pbpo106e_ch11 ◽

2018 ◽

pp. 179-195

Author(s):

Machteld Lamers ◽

Arthur Weeber

Keyword(s):

Silicon Nitride ◽

Amorphous Silicon ◽

Surface Passivation ◽

Passivation Layer ◽

Visible photoluminescence from low temperature deposited hydrogenated amorphous silicon nitride

Solid State Communications ◽

10.1016/0038-1098(96)00064-6 ◽

1996 ◽

Vol 98 (4) ◽

pp. 273-277 ◽

Cited By ~ 31

Author(s):

Atilla Aydinli ◽

Ali Serpengüzel ◽

Didem Vardar

Keyword(s):

Silicon Nitride ◽

Low Temperature ◽

Amorphous Silicon ◽

Visible Photoluminescence ◽

Investigations of N-H and Si-N Bonding Configurations in Hydrogenated Amorphous Silicon Nitride Films by Infrared Absorption Spectroscopy

Japanese Journal of Applied Physics ◽

10.1143/jjap.24.l861 ◽

1985 ◽

Vol 24 (Part 2, No. 11) ◽

pp. L861-L863 ◽

Cited By ~ 44

Author(s):

Shiro Narikawa ◽

Yoshimi Kojima ◽

Shaw Ehara

Keyword(s):

Silicon Nitride ◽

Amorphous Silicon ◽

Absorption Spectroscopy ◽

Infrared Absorption ◽

Infrared Absorption Spectroscopy ◽

Silicon Nitride Films ◽

Optical properties and local bonding configurations of hydrogenated amorphous silicon nitride thin films

Journal of Applied Physics ◽

10.1063/1.2356915 ◽

2006 ◽

Vol 100 (7) ◽

pp. 073516 ◽

Cited By ~ 39

Author(s):

J. J. Mei ◽

H. Chen ◽

W. Z. Shen ◽

H. F. W. Dekkers

Keyword(s):

Thin Films ◽

Optical Properties ◽

Silicon Nitride ◽

Amorphous Silicon ◽

Local Bonding ◽