Ferroelectric Aluminum Scandium Nitride Thin Film Bulk Acoustic Resonators with Polarization‐Dependent Operating States

2021 ◽  
pp. 2100034
Author(s):  
Jialin Wang ◽  
Yue Zheng ◽  
Azadeh Ansari
Keyword(s):  
Thin Film ◽  
Acoustic Resonators ◽  
Scandium Nitride ◽  
Film Bulk Acoustic Resonators ◽  
Film Bulk

Aluminum scandium nitride thin-film bulk acoustic resonators for wide band applications

Vacuum ◽  
2011 ◽  
Vol 86 (1) ◽  
pp. 23-26 ◽  
Author(s):  
Milena Moreira ◽  
Johan Bjurström ◽  
Ilia Katardjev ◽  
Ventsislav Yantchev
Keyword(s):  
Thin Film ◽  
Wide Band ◽  
Acoustic Resonators ◽  
Scandium Nitride ◽  
Film Bulk Acoustic Resonators ◽  
Film Bulk

PCS 1900 MHz duplexer using thin film bulk acoustic resonators (FBARs)

1999 ◽  
Vol 35 (10) ◽  
pp. 794 ◽  
Author(s):  
R. Ruby ◽  
P. Bradley ◽  
J.D. Larson ◽  
Y. Oshmyansky
Keyword(s):  
Thin Film ◽  
Acoustic Resonators ◽  
Film Bulk Acoustic Resonators ◽  
Film Bulk

Super-High-Frequency Band Filters Configured with Air-Gap-Type Thin-Film Bulk Acoustic Resonators

2010 ◽  
Vol 49 (7) ◽  
pp. 07HD13 ◽  
Author(s):  
Motoaki Hara ◽  
Tsuyoshi Yokoyama ◽  
Takeshi Sakashita ◽  
Shinji Taniguchi ◽  
Masafumi Iwaki ◽  
...  
Keyword(s):  
Thin Film ◽  
Frequency Band ◽  
High Frequency ◽  
Air Gap ◽  
High Frequency Band ◽  
Acoustic Resonators ◽  
Film Bulk Acoustic Resonators ◽  
Film Bulk ◽  
Super High Frequency

Electro-acoustic hysteresis behaviour of PZT thin film bulk acoustic resonators

2004 ◽  
Vol 24 (6) ◽  
pp. 1589-1592 ◽  
Author(s):  
M. Schreiter ◽  
R. Gabl ◽  
D. Pitzer ◽  
R. Primig ◽  
W. Wersing
Keyword(s):  
Thin Film ◽  
Acoustic Resonators ◽  
Pzt Thin Film ◽  
Film Bulk Acoustic Resonators ◽  
Film Bulk ◽  
Hysteresis Behaviour

Effects of electrodes on performance figures of thin film bulk acoustic resonators

2007 ◽  
Vol 122 (3) ◽  
pp. 1646-1651 ◽  
Author(s):  
Tao Zhang ◽  
Hui Zhang ◽  
Zuo-qing Wang ◽  
Shu-yi Zhang
Keyword(s):  
Thin Film ◽  
Acoustic Resonators ◽  
Film Bulk Acoustic Resonators ◽  
Film Bulk
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