No‐Heating Deposition of 1‐μm‐Thick Y‐Doped HfO 2 Ferroelectric Films with Good Ferroelectric and Piezoelectric Properties by Radio Frequency Magnetron Sputtering Method

2022 ◽  
pp. 2100574
Author(s):  
Reijiro Shimura ◽  
Takanori Mimura ◽  
Akinori Tateyama ◽  
Takahisa Shiraishi ◽  
Takao Shimizu ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Piezoelectric Properties ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Ferroelectric Films ◽  
Ferroelectric And Piezoelectric Properties

scholarly journals Nickel telluride vertically aligned thin film by radio-frequency magnetron sputtering for hydrogen evolution reaction

APL Materials ◽  
2020 ◽  
Vol 8 (12) ◽  
pp. 121104
Author(s):  
Jeonghyeon Oh ◽  
Ho Jun Park ◽  
Arindam Bala ◽  
Hee-Soo Kim ◽  
Na Liu ◽  
...  
Keyword(s):  
Thin Film ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Hydrogen Evolution ◽  
Hydrogen Evolution Reaction ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Vertically Aligned
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