No‐Heating Deposition of 1‐μm‐Thick Y‐Doped HfO 2 Ferroelectric Films with Good Ferroelectric and Piezoelectric Properties by Radio Frequency Magnetron Sputtering Method

physica status solidi (RRL) - Rapid Research Letters ◽

10.1002/pssr.202100574 ◽

2022 ◽

pp. 2100574

Author(s):

Reijiro Shimura ◽

Takanori Mimura ◽

Akinori Tateyama ◽

Takahisa Shiraishi ◽

Takao Shimizu ◽

...

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Piezoelectric Properties ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Ferroelectric Films ◽

Ferroelectric And Piezoelectric Properties

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Ferroelectric and piezoelectric properties of Na0.52K0.48NbO3 thin films prepared by radio frequency magnetron sputtering

Applied Physics Letters ◽

10.1063/1.3095500 ◽

2009 ◽

Vol 94 (9) ◽

pp. 092902 ◽

Author(s):

Hai Joon Lee ◽

Ill Won Kim ◽

Jin Soo Kim ◽

Chang Won Ahn ◽

Bae Ho Park

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Piezoelectric Properties ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Ferroelectric And Piezoelectric Properties

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Piezoelectric properties and surface potential behavior in LiNbO3 thin films grown by the radio frequency magnetron sputtering

Journal of Alloys and Compounds ◽

10.1016/j.jallcom.2013.01.116 ◽

2014 ◽

Vol 586 ◽

pp. S336-S338 ◽

Author(s):

R.N. Zhukov ◽

A.S. Bykov ◽

D.A. Kiselev ◽

M.D. Malinkovich ◽

Yu.N. Parkhomenko

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Surface Potential ◽

Piezoelectric Properties ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering

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Preparation of near-1-µm-thick {100}-oriented epitaxial Y-doped HfO2 ferroelectric films on (100)Si substrates by a radio-frequency magnetron sputtering method

Journal of the Ceramic Society of Japan ◽

10.2109/jcersj2.20019 ◽

2020 ◽

Vol 128 (8) ◽

pp. 539-543

Author(s):

Reijiro SHIMURA ◽

Takanori MIMURA ◽

Takao SHIMIZU ◽

Yoshitomo TANAKA ◽

Yukari INOUE ◽

...

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Ferroelectric Films ◽

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Effect of Plused Negative Bias on Nucleation and Morphological Evolution of ZnO Films Deposited by Reactive Radio-frequency Magnetron Sputtering

Journal of Inorganic Materials ◽

10.3724/sp.j.1077.2009.00602 ◽

2009 ◽

Vol 24 (3) ◽

pp. 602-606 ◽

Author(s):

Wei-Jia FU ◽

Zhi-Wen LIU ◽

Jian-Feng GU ◽

Ming LIU ◽

Qing-Yu ZHANG

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Morphological Evolution ◽

Radio Frequency Magnetron ◽

Zno Films ◽

Negative Bias ◽

Radio Frequency Magnetron Sputtering

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Effect of sputtering power on the properties of SiO2 films grown by radio frequency magnetron sputtering at room temperature

Optical and Quantum Electronics ◽

10.1007/s11082-020-02639-4 ◽

2021 ◽

Vol 53 (1) ◽

Author(s):

Changjiang Zhao ◽

Leran Zhao ◽

Juncheng Liu ◽

Zhigang Liu ◽

Yan Chen

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Room Temperature ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Sputtering Power

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Mechanical, tribological, anti-corrosion and anti-glass sticking properties of high-entropy TaNbSiZrCr carbide coatings prepared using radio-frequency magnetron sputtering

Materials Chemistry and Physics ◽

10.1016/j.matchemphys.2021.124741 ◽

2021 ◽

pp. 124741

Author(s):

W.H. Kao ◽

Y.L. Su ◽

J.H. Horng ◽

W.C. Wu

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

High Entropy ◽

Carbide Coatings

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Nickel telluride vertically aligned thin film by radio-frequency magnetron sputtering for hydrogen evolution reaction

APL Materials ◽

10.1063/5.0024588 ◽

2020 ◽

Vol 8 (12) ◽

pp. 121104

Author(s):

Jeonghyeon Oh ◽

Ho Jun Park ◽

Arindam Bala ◽

Hee-Soo Kim ◽

Na Liu ◽

...

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Hydrogen Evolution ◽

Hydrogen Evolution Reaction ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Vertically Aligned

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Study of silicon quantum dots structure growth using radio frequency magnetron sputtering

2010 International Conference on Enabling Science and Nanotechnology (ESciNano) ◽

10.1109/escinano.2010.5701070 ◽

2010 ◽

Author(s):

Samsudi Sakrani ◽

Fatima Aldaw Idrees ◽

Zulkafli Othaman ◽

Abd. Khamim Ismail

Keyword(s):

Quantum Dots ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Silicon Quantum Dots

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Structural and optical properties of CdSe0.2Te0.8 thin films prepared by radio frequency magnetron sputtering

Materials Letters ◽

10.1016/j.matlet.2021.129320 ◽

2021 ◽

Vol 288 ◽

pp. 129320

Author(s):

Guangqiang He ◽

Zhihui Xiong ◽

Hui Yang ◽

Ming Yang ◽

Zhixi Li ◽

...

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Structural And Optical Properties

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Radio frequency magnetron sputtering of thick film amorphous beryllium

Journal of Vacuum Science and Technology ◽

10.1116/1.570467 ◽

1980 ◽

Vol 17 (1) ◽

pp. 407-410 ◽

Author(s):

R. J. Burt ◽

S. F. Meyer ◽

E. J. Hsieh

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering

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