scholarly journals Preparation of near-1-µm-thick {100}-oriented epitaxial Y-doped HfO2 ferroelectric films on (100)Si substrates by a radio-frequency magnetron sputtering method

2020 ◽  
Vol 128 (8) ◽  
pp. 539-543
Author(s):  
Reijiro SHIMURA ◽  
Takanori MIMURA ◽  
Takao SHIMIZU ◽  
Yoshitomo TANAKA ◽  
Yukari INOUE ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Ferroelectric Films ◽  
Si Substrates

The Interfacial Characteristics of Ba0.6Sr0.4TiO3 Films Deposited by Radio Frequency Magnetron Sputtering

2007 ◽  
Vol 336-338 ◽  
pp. 374-376
Author(s):  
Jia Xuan Liao ◽  
C.R. Yang ◽  
J.H. Zhang ◽  
H. Chen ◽  
C.L. Fu ◽  
...  
Keyword(s):  
Dielectric Properties ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Thermal Annealing ◽  
Transition Layer ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Si Substrates ◽  
Bst Films ◽  
Interfacial Characteristics

Ba0.6Sr0.4TiO3 (BST) thin films deposited on Pt/Ti/SiO2/Si substrates by radio frequency magnetron sputtering and crystallized by rapid thermal annealing (RTA) exhibit much thinner BST/Pt interfacial transition layer and higher dielectric properties than the films crystallized by conventional thermal annealing (CTA). HRTEM observations show that the transition layer is 2-3nm thick for RTA and 4-5nm thick for CTA. XPS investigations display that the transition layer is composed of perovskited BST phase and non-perovskited BST phase, and RTA corresponds to much less non-perovskited BST phase than CTA. The reason for non-perovskited BST phase and the dielectric properties of BST films are also presented.

Preparation of (100)‐oriented metallic LaNiO3 thin films on Si substrates by radio frequency magnetron sputtering for the growth of textured Pb(Zr0.53Ti0.47)O3

1995 ◽  
Vol 66 (20) ◽  
pp. 2643-2645 ◽  
Author(s):  
Ching‐Chyuan Yang ◽  
Ming‐Sen Chen ◽  
Tian‐Jue Hong ◽  
Chii‐Ming Wu ◽  
Jenn‐Ming Wu ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Si Substrates
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