P-10: Comparative Studies of ZnON and ZnO Thin Film Transistors Fabricated by DC Reactive Sputtering Method

2015 ◽  
Vol 46 (1) ◽  
pp. 1155-1157
Author(s):  
Kyung-Chul Ok ◽  
Hyun-Jun Jeong ◽  
Hyun-Mo Lee ◽  
Hyun-Suk Kim ◽  
Jin-Seong Park
Keyword(s):  
Thin Film ◽  
Comparative Studies ◽  
Thin Film Transistors ◽  
Reactive Sputtering ◽  
Zno Thin Film

Mobility Enhancement and OFF Current Suppression in Atomic-Layer-Deposited ZnO Thin-Film Transistors by Post Annealing in O2

2014 ◽  
Vol 35 (12) ◽  
pp. 1266-1268 ◽  
Author(s):  
Yang Geng ◽  
Wen Yang ◽  
Hong-Liang Lu ◽  
Yuan Zhang ◽  
Qing-Qing Sun ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
Atomic Layer ◽  
Zno Thin Film ◽  
Post Annealing

Reactive Radiofrequency Sputtering-Deposited Nanocrystalline ZnO Thin-Film Transistors

2012 ◽  
Vol 29 (1) ◽  
pp. 018501 ◽  
Author(s):  
Shao-Juan Li ◽  
Xin He ◽  
De-Dong Han ◽  
Lei Sun ◽  
Yi Wang ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
Zno Thin Film

Thermal conductivity of ZnO thin film produced by reactive sputtering

2012 ◽  
Vol 111 (8) ◽  
pp. 084320 ◽  
Author(s):  
Yibin Xu ◽  
Masahiro Goto ◽  
Ryozo Kato ◽  
Yoshihisa Tanaka ◽  
Yutaka Kagawa
Keyword(s):  
Thin Film ◽  
Thermal Conductivity ◽  
Reactive Sputtering ◽  
Zno Thin Film
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