High spatial resolution extended x-ray emission fine structure (EXEFS) spectra of an electronic device measured by electron probe microanalysis (EPMA)

2001 ◽  
Vol 31 (2) ◽  
pp. 114-117 ◽  
Author(s):  
Jun Kawai ◽  
Hideyuki Takahashi
Keyword(s):  
Fine Structure ◽  
Spatial Resolution ◽  
Electron Probe Microanalysis ◽  
Electron Probe ◽  
High Spatial Resolution ◽  
Electronic Device ◽  
X Ray

A sub-micrometer resolution hard X-ray microprobe system of BL8C at Pohang Light Source

2015 ◽  
Vol 22 (5) ◽  
pp. 1306-1311 ◽  
Author(s):  
Nark-Eon Sung ◽  
Ik-Jae Lee ◽  
Kug-Seong Lee ◽  
Seong-Hun Jeong ◽  
Seen-Woong Kang ◽  
...  
Keyword(s):  
Trace Elements ◽  
Fine Structure ◽  
South Korea ◽  
Spatial Resolution ◽  
High Spatial Resolution ◽  
Structural Information ◽  
Complex Materials ◽  
X Ray ◽  
Pohang Light Source ◽  
X Ray Absorption

A microprobe system has been installed on the nanoprobe/XAFS beamline (BL8C) at PLS-II, South Korea. Owing to the reproducible switch of the gap of the in-vacuum undulator (IVU), the intense and brilliant hard X-ray beam of an IVU can be used in X-ray fluorescence (XRF) and X-ray absorption fine-structure (XAFS) experiments. For high-spatial-resolution microprobe experiments a Kirkpatrick–Baez mirror system has been used to focus the millimeter-sized X-ray beam to a micrometer-sized beam. The performance of this system was examined by a combination of micro-XRF imaging and micro-XAFS of a beetle wing. These results indicate that the microprobe system of the BL8C can be used to obtain the distributions of trace elements and chemical and structural information of complex materials.

Extended x-ray emission fine structure and high-energy satellite lines state measured by electron probe microanalysis

2001 ◽  
Vol 31 (2) ◽  
pp. 118-125 ◽  
Author(s):  
Hideyuki Takahashi ◽  
Ian Harrowfield ◽  
Colin MacRae ◽  
Nick Wilson ◽  
Kenichi Tsutsumi
Keyword(s):  
Fine Structure ◽  
Electron Probe Microanalysis ◽  
Electron Probe ◽  
High Energy ◽  
X Ray

Spatial resolution of X-ray microanalysis in thin foils

1978 ◽  
Vol 36 (1) ◽  
pp. 544-545
Author(s):  
R. Hutchings ◽  
I.P. Jones ◽  
M.H. Loretto ◽  
R.E. Smallman
Keyword(s):  
Spatial Resolution ◽  
Electron Probe ◽  
Beam Divergence ◽  
Inelastic Interaction ◽  
Specimen Thickness ◽  
High Current ◽  
Beam Spreading ◽  
X Ray ◽  
Thin Foils ◽  
Complex Calculation

There is increasing interest in X-ray microanalysis of thin specimens and the present paper attempts to define some of the factors which govern the spatial resolution of this type of microanalysis. One of these factors is the spreading of the electron probe as it is transmitted through the specimen. There will always be some beam-spreading with small electron probes, because of the inevitable beam divergence associated with small, high current probes; a lower limit to the spatial resolution is thus 2αst where 2αs is the beam divergence and t the specimen thickness.In addition there will of course be beam spreading caused by elastic and inelastic interaction between the electron beam and the specimen. The angle through which electrons are scattered by the various scattering processes can vary from zero to 180° and it is clearly a very complex calculation to determine the effective size of the beam as it propagates through the specimen.

High spatial resolution x-ray microanalysis of interfaces

1995 ◽  
Vol 53 ◽  
pp. 284-285
Author(s):  
J. R. Michael
Keyword(s):  
Spatial Resolution ◽  
Electron Probe ◽  
Solid Angle ◽  
Collection Efficiency ◽  
Spatial Scales ◽  
Energy Dispersive Spectrometer ◽  
X Rays ◽  
X Ray ◽  
Probe Size ◽  
Brightness Field

X-ray microanalysis in the analytical electron microscope (AEM) refers to a technique by which chemical composition can be determined on spatial scales of less than 10 nm. There are many factors that influence the quality of x-ray microanalysis. The minimum probe size with sufficient current for microanalysis that can be generated determines the ultimate spatial resolution of each individual microanalysis. However, it is also necessary to collect efficiently the x-rays generated. Modern high brightness field emission gun equipped AEMs can now generate probes that are less than 1 nm in diameter with high probe currents. Improving the x-ray collection solid angle of the solid state energy dispersive spectrometer (EDS) results in more efficient collection of x-ray generated by the interaction of the electron probe with the specimen, thus reducing the minimum detectability limit. The combination of decreased interaction volume due to smaller electron probe size and the increased collection efficiency due to larger solid angle of x-ray collection should enhance our ability to study interfacial segregation.

High spatial-resolution reflectivity and fluorescence mapping of multilayers using a sub-micrometer focused synchrotron X-ray beam

2003 ◽  
Vol 104 ◽  
pp. 247-250
Author(s):  
T. Bigault ◽  
E. Ziegler ◽  
Ch. Morawe ◽  
W. Ludwig ◽  
R. Soufli
Keyword(s):  
Spatial Resolution ◽  
High Spatial Resolution ◽  
X Ray

QUANTITATIVE X-RAY COMPOSITIONAL MAPPING BY ELECTRON PROBE MICROANALYSIS OF COMPLEX LUNAR SAMPLES

2018 ◽  
Author(s):  
Sarah N. Valencia ◽  
◽  
Paul K. Carpenter ◽  
Bradley L. Jolliff
Keyword(s):  
Electron Probe Microanalysis ◽  
Electron Probe ◽  
X Ray ◽  
Lunar Samples
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